Inventor · disambiguated record
Ta-Hao Kuo
Also filed as: KUO TA-HAO
8 granted patents·9 pending applications·15 citations·filing 2020–2025
78Inventor score
Files withSKY TECH INC17
Top patents by PatentIndex Score
17 records- 0196US11739423B2Atomic layer deposition apparatus for coating on fine powdersSKY TECH INC·Filed 2021·Granted Aug 29, 2023·10 cites·10 claims
- 0291US11427910B2Atomic layer deposition equipment capable of reducing precursor deposition and atomic layer deposition process method using the sameSKY TECH INC·Filed 2020·Granted Aug 30, 2022·2 cites·7 claims
- 0389US11332826B1Atomic layer deposition equipment and process methodSKY TECH INC·Filed 2020·Granted May 17, 2022·2 cites·7 claims
- 0485US11476100B1Shielding mechanism and substrate-processing chamber with the sameSKY TECH INC·Filed 2021·Granted Oct 18, 2022·1 cites·18 claims
- 0585US2025369111A1Uv-assisted and plasma enhanced process methodSKY TECH INC·Filed 2025·Application pending·0 cites
- 0679US12421600B22-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamberSKY TECH INC·Filed 2023·Granted Sep 23, 2025·0 cites·9 claims
- 0767US2025083956A1Low concentration ozone gas supply deviceSKY TECH INC·Filed 2023·Application pending·0 cites
- 0861US2022270913A1Wafer-holding device and thin-film-deposition equipment using the sameSKY TECH INC·Filed 2021·Application pending·0 cites
- 0960US12403685B2Plate cooling device and de-bonding station with plate cooling deviceSKY TECH INC·Filed 2023·Granted Sep 2, 2025·0 cites·9 claims
- 1060US12224159B1Gas mixing method to enhance plasmaSKY TECH INC·Filed 2023·Granted Feb 11, 2025·0 cites·16 claims
- 1159US2025051907A1Particle prevention method in chamberSKY TECH INC·Filed 2023·Application pending·0 cites
- 1258US11846022B2Thin-film-deposition machineSKY TECH INC·Filed 2022·Granted Dec 19, 2023·0 cites·18 claims
- 1358US2025232989A1Wafer holder device having heating functionSKY TECH INC·Filed 2024·Application pending·0 cites
- 1456US2022282378A1Shielding mechanism and substrate-processing device with the sameSKY TECH INC·Filed 2021·Application pending·0 cites
- 1556US2025128372A1Holder plate for negative pressure chucking, holder device for negative pressure chucking, and de-bonding stationSKY TECH INC·Filed 2023·Application pending·0 cites
- 1655US2025149366A1Wafer holding device having function of positioning waferSKY TECH INC·Filed 2023·Application pending·0 cites
- 1755US2024194492A1Separation method of bonded substratesSKY TECH INC·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →