Assignee
SKY TECH INC
TW·45 granted patents·21 pending applications·69 citations·filing 2020–2025
Top patents by PatentIndex Score
66 records- 0198US11891695B2Vibrating deposition deviceSKY TECH INC·Filed 2022·Granted Feb 6, 2024·3 cites·20 claims
- 0298US11532469B1Shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Dec 20, 2022·8 cites·20 claims
- 0398US11482403B1Thin-film-deposition equipment for detecting shielding mechanismSKY TECH INC·Filed 2021·Granted Oct 25, 2022·6 cites·20 claims
- 0497US11767591B2Detachable atomic layer deposition apparatus for powdersSKY TECH INC·Filed 2021·Granted Sep 26, 2023·8 cites·8 claims
- 0597US11527391B1Position-detectable shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Dec 13, 2022·6 cites·20 claims
- 0697US11476101B1Double-layer shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Oct 18, 2022·6 cites·20 claims
- 0796US11739423B2Atomic layer deposition apparatus for coating on fine powdersSKY TECH INC·Filed 2021·Granted Aug 29, 2023·10 cites·10 claims
- 0895US11596973B2Double-shaft shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Mar 7, 2023·2 cites·10 claims
- 0994US11898238B2Shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Feb 13, 2024·2 cites·20 claims
- 1094US11869792B2Alignment mechanism and alignment method of bonding machineSKY TECH INC·Filed 2021·Granted Jan 9, 2024·2 cites·20 claims
- 1193US11952662B2Powder atomic layer deposition equipment with quick release functionSKY TECH INC·Filed 2021·Granted Apr 9, 2024·2 cites·13 claims
- 1292US11322380B1Substrate transfer system with tray alignerSKY TECH INC·Filed 2021·Granted May 3, 2022·2 cites·20 claims
- 1391US11427910B2Atomic layer deposition equipment capable of reducing precursor deposition and atomic layer deposition process method using the sameSKY TECH INC·Filed 2020·Granted Aug 30, 2022·2 cites·7 claims
- 1489US11332826B1Atomic layer deposition equipment and process methodSKY TECH INC·Filed 2020·Granted May 17, 2022·2 cites·7 claims
- 1588US11735456B2Alignment mechanism and alignment method of bonding machineSKY TECH INC·Filed 2021·Granted Aug 22, 2023·2 cites·13 claims
- 1687US11598006B2Wafer support and thin-film deposition apparatus using the sameSKY TECH INC·Filed 2021·Granted Mar 7, 2023·1 cites·16 claims
- 1785US11476100B1Shielding mechanism and substrate-processing chamber with the sameSKY TECH INC·Filed 2021·Granted Oct 18, 2022·1 cites·18 claims
- 1885US2025369111A1Uv-assisted and plasma enhanced process methodSKY TECH INC·Filed 2025·Application pending·0 cites
- 1982US11597999B2Method and device for decreasing generation of surface oxide of aluminum nitrideSKY TECH INC·Filed 2020·Granted Mar 7, 2023·2 cites·5 claims
- 2081US11401608B2Atomic layer deposition equipment and process methodSKY TECH INC·Filed 2020·Granted Aug 2, 2022·2 cites·17 claims
- 2179US12421600B22-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamberSKY TECH INC·Filed 2023·Granted Sep 23, 2025·0 cites·9 claims
- 2279US12129541B2Deposition method for tuning magnetic field distribution of deposition equipmentSKY TECH INC·Filed 2022·Granted Oct 29, 2024·0 cites·4 claims
- 2374US11972936B2Shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Apr 30, 2024·0 cites·20 claims
- 2473US11961724B2Shielding device and thin-film-deposition equipment with the sameSKY TECH INC·Filed 2021·Granted Apr 16, 2024·0 cites·14 claims
- 2572US11929242B2Shielding mechanism and thin-film-deposition equipment using the sameSKY TECH INC·Filed 2021·Granted Mar 12, 2024·0 cites·14 claims
- 2670US2022384166A1Magnetic-field-distribution tuner, deposition equipment and method of depositionSKY TECH INC·Filed 2021·Application pending·0 cites
- 2768US11773319B2Quantum dot particles with passivation layer and manufacturing method thereofSKY TECH INC·Filed 2021·Granted Oct 3, 2023·0 cites·19 claims
- 2867US2025083956A1Low concentration ozone gas supply deviceSKY TECH INC·Filed 2023·Application pending·0 cites
- 2965US2022267901A1Wafer-holding device and deposition equipment using the sameSKY TECH INC·Filed 2021·Application pending·0 cites
- 3065US2025305136A1Batch type panel atomic layer deposition apparatusSKY TECH INC·Filed 2024·Application pending·0 cites
- 3163US11685996B2Atomic layer deposition deviceSKY TECH INC·Filed 2021·Granted Jun 27, 2023·0 cites·20 claims
- 3262US11981990B2Deposition equipment with shielding mechanismSKY TECH INC·Filed 2022·Granted May 14, 2024·0 cites·20 claims
- 3361US2023366090A1Method for controlling substrate carrier of deposition apparatusSKY TECH INC·Filed 2022·Application pending·0 cites
- 3461US2022270913A1Wafer-holding device and thin-film-deposition equipment using the sameSKY TECH INC·Filed 2021·Application pending·0 cites
- 3560US12403685B2Plate cooling device and de-bonding station with plate cooling deviceSKY TECH INC·Filed 2023·Granted Sep 2, 2025·0 cites·9 claims
- 3660US12224159B1Gas mixing method to enhance plasmaSKY TECH INC·Filed 2023·Granted Feb 11, 2025·0 cites·16 claims
- 3759US12409612B2Bonding method and apparatus of substratesSKY TECH INC·Filed 2023·Granted Sep 9, 2025·0 cites·9 claims
- 3859US12371790B2Wafer carrier with adjustable alignment devices and deposition equipment using the sameSKY TECH INC·Filed 2022·Granted Jul 29, 2025·0 cites·10 claims
- 3959US11987883B2Powder atomic layer deposition apparatus for blowing powdersSKY TECH INC·Filed 2021·Granted May 21, 2024·0 cites·10 claims
- 4059US2025051907A1Particle prevention method in chamberSKY TECH INC·Filed 2023·Application pending·0 cites
- 4158US12040215B2Bonding machine with movable suction modulesSKY TECH INC·Filed 2022·Granted Jul 16, 2024·0 cites·20 claims
- 4258US11846022B2Thin-film-deposition machineSKY TECH INC·Filed 2022·Granted Dec 19, 2023·0 cites·18 claims
- 4358US2025232989A1Wafer holder device having heating functionSKY TECH INC·Filed 2024·Application pending·0 cites
- 4457US12031208B2Atomic layer deposition apparatus for powdersSKY TECH INC·Filed 2021·Granted Jul 9, 2024·0 cites·20 claims
- 4557US11891694B2Atomic-layer-deposition equipment and atomiclayer-deposition method by using the sameSKY TECH INC·Filed 2021·Granted Feb 6, 2024·0 cites·14 claims
- 4657US11532665B2Manufacturing method and manufacturing machine for reducing non-radiative recombination of micro LEDSKY TECH INC·Filed 2020·Granted Dec 20, 2022·0 cites·12 claims
- 4757US2024242946A1Low power plasma system monitor methodSKY TECH INC·Filed 2023·Application pending·0 cites
- 4856US11652190B2Semiconductor component with oxidized aluminum nitride film and manufacturing method thereofSKY TECH INC·Filed 2021·Granted May 16, 2023·0 cites·11 claims
- 4956US2022282378A1Shielding mechanism and substrate-processing device with the sameSKY TECH INC·Filed 2021·Application pending·0 cites
- 5056US2025128372A1Holder plate for negative pressure chucking, holder device for negative pressure chucking, and de-bonding stationSKY TECH INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 66 patent records by PatentIndex Score.
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