Shielding mechanism and thin-film-deposition equipment using the same

Abstract

The present disclosure provides a shielding mechanism and a thin-film-deposition equipment using the same, wherein the shielding mechanism includes two shield members and a driver. The driver includes a motor and a shaft seal. The motor interconnects the two shield members via the shaft seal, and such that to drive the two shield members to sway in opposite directions and to switch between an open state and a shielding state. Furthermore, each of the two shield members is formed with at least one cavity, for reducing weights thereof and loading of the motor and the driver.

We claim: 
     
       1. A thin-film-deposition equipment, comprising:
 a reaction chamber comprising a containing space, with a target material disposed on a ceiling surface of the reaction chamber; 
 a carrier disposed within the containing space for carrying at least one substrate thereon, and the target material facing the carrier; and 
 a shielding mechanism comprising:
 a first-shield member that is disposed within the containing space; 
 a second-shield member that is disposed within the containing space, wherein each of the first-shield member and the second-shield member is formed as a half-round plate, and both of the first-shield member and the second-shield member are formed with at least one cavity facing the carrier to reduce weights of the first-shield member and the second-shield member, wherein the first-shield member and the second-shield member are arranged on a same plane; and 
 a first-connecting arm for carrying the first-shield member; and 
 a second-connecting arm for carrying the second-shield member; 
 at least one driver that comprises:
 a shaft seal which interconnects the first-shield member and the second-shield member; wherein the shaft seal comprises an outer tube and a main shaft contained within the outer tube; 
 at least one motor which is connected to the shaft seal and which respectively drives and swings the first-shield member and the second-shield member in opposite directions synchronously to switch between an open state and a shielding state via the shaft seal; 
 wherein in the open state, the first-shield member and the second-shield member swing away from each other to have an open space therebetween to expose the carrier to the target material; and 
 wherein in the shielding state, the first-shield member and the second-shield member approach each other to form a round plate as a whole shield to shield the carrier to cover the carrier, wherein the first shield member and the second shield member operating in the shielding state are not in direct contact to form a distance therebetween in the same plane that the first shield member and the second shield member are arranged on, and the distance is less than 1 mm; 
 wherein the main shaft is connected to the first-shield member via the first-connecting arm, the outer tube is connected to the second-shield member via the second-connecting arm, and the at least one motor drives the main shaft and the outer tube to rotate to respectively swing the first-shield member and the second-shield member in the opposite directions synchronously; 
 wherein the first-connecting arm includes a first protrusion with a first-reflective surface thereon perpendicular to an extending direction of the first-connecting arm, the second-connecting arm includes a second protrusion with a second-reflective surface thereon perpendicular to an extending direction of the second-connecting arm; 
 wherein the thin-film-deposition equipment further comprises:
 a first-distance sensor disposed on side of the first-shield member, wherein the first-distance sensor emits and projects a first-optical beam onto the first-reflective surface when the first-shield member is operated in the shielding state; and 
 a second-distance sensor disposed on side of the second-shield member, wherein the second-distance sensor emits and projects a second-optical beam onto the second-reflective surface when the second-shield member is operated in the shielding state. 
 
 
 
 
     
     
       2. The thin-film-deposition equipment according to  claim 1 , further comprising two first-position sensors that are disposed adjacent to the outer tube of the shaft seal of the at least one driver for respectively detecting that the outer tube has rotated to a first position and detecting that the outer tube has rotated to a second position, wherein when the outer tube rotates to the first position, the second-shield member is operated into the open state; and when the outer tube rotates to the second position, the second-shield member is operated into the shielding state. 
     
     
       3. The thin-film-deposition equipment according to  claim 2 , further comprising two second-position sensors that are disposed adjacent to the main shaft of the shaft seal of the at least one driver for respectively detecting that the main shaft tube has rotated to a third position and detecting that the main shaft has rotated to a fourth position; when the main shaft rotates to the third position, the first-shield member is operated into the open state; and when the main shaft rotates to the fourth position, the first-shield member is operated into the shielding state. 
     
     
       4. The thin-film-deposition equipment according to  claim 3 , further comprising a first-tongue unit and a second-tongue unit, wherein the first-tongue unit is connected to the outer tube; the second-tongue unit is connected to the main shaft; the first-tongue unit rotates with the outer tube to be detected by the first-position sensors; and the second-tongue unit rotates with the main shaft to be detected by the second-position sensors. 
     
     
       5. The thin-film-deposition equipment according to  claim 1 , wherein each of the first-shield member and the second-shield member is disposed with a plurality of shield positioners; each of the first-connecting arm and the second-connecting arm is disposed with a plurality of arm positioners; the shield positioners of the first-shield member faces the arm positioners of the first-connecting arm, such that to position the first-shield member on the first-connecting arm; and the shield positioners of the second-shield member faces the arm positioners of the second-connecting arm, such that to position the second-shield member on the second-connecting aim. 
     
     
       6. The thin-film-deposition equipment according to  claim 5 , wherein the shield positioners of the first-shield member and the second-shield member are pins; and the arm positioners of the first-connecting arm and the second-connecting arm are slots. 
     
     
       7. The thin-film-deposition equipment according to  claim 1 , wherein the at least one driver is two as a first driver and a second driver; the shaft seal of the first driver is connected to the first-shield member, and the at least one motor of the first driver drives and swings the first-shield member; the shaft seal of the second driver is connected to the second-shield member, and the at least one motor of the second driver drives and swings the second-shield member; and the first driver and the second driver respectively drives and swings the first-shield member and the second-shield member to move in the opposite direction and to switch into the open state and the shielding state. 
     
     
       8. A shielding mechanism adapted to a thin-film-deposition equipment, comprising:
 a first-shield member; 
 a second-shield member, wherein each of the first-shield member and the second-shield member is formed as a half round plate, and each of the first-shield member and the second-shield member has a bottom surface formed with at least one cavity to reduce weights of the first-shield member and the second-shield member, wherein the first-shield member and the second-shield member arranged on a same plane; and
 a first-connecting arm for carrying the first-shield member; and 
 a second-connecting arm for carrying the second-shield member; 
 
 at least one driver comprising:
 a shaft seal that interconnects the first-shield member and the second-shield member; wherein the shaft seal comprises an outer tube and a main shaft contained within the outer tube; 
 at least one motor that is connected to the shaft seal and that respectively drives and swings the first-shield member and the second-shield member in opposite directions synchronously to switch between an open state and a shielding state via the shaft seal; 
 wherein in the open state, the first-shield member and the second-shield member swing away from each other to have an open space therebetween; and 
 wherein in the shielding state, the first-shield member and the second-shield member approach each other to form a round plate as a whole shield to shield a carrier, wherein the first shield member and the second shield member operating in the shielding state are not in direct contact to form a distance therebetween in the same plane that the first shield member and the second shield member are arranged on, and the distance is less than 1 mm;
 wherein the main shaft is connected to the first-shield member via the first-connecting arm, the outer tube is connected to the second-shield member via the second-connecting arm, and the at least one motor drives the main shaft and the outer tube to rotate to respectively swing the first-shield member and the second-shield member in the opposite directions synchronously; 
 wherein the first-connecting arm includes a first protrusion with a first-reflective surface thereon perpendicular to an extending direction of the first-connecting arm, the second-connecting arm includes a second protrusion with a second-reflective surface thereon perpendicular to an extending direction of the second-connecting arm; 
 wherein the shielding mechanism further comprises:
 a first-distance sensor disposed on side of the first-shield member, wherein the first-distance sensor emits and projects a first-optical beam onto the first-reflective surface when the first-shield member is operated in the shielding state; and 
 a second-distance sensor disposed on side of the second-shield member, wherein the second-distance sensor emits and projects a second-optical beam onto the second-reflective surface when the second-shield member is operated in the shielding state. 
 
 
 
 
     
     
       9. The shielding mechanism according to  claim 8 , further comprising two first-position sensors that are disposed adjacent to the outer tube of the shaft seal of the at least one driver for respectively detecting that the outer tube has rotated to a first position and detecting that the outer tube has rotated to a second position, wherein when the outer tube rotates to the first position, the second-shield member is operated into the open state; and when the outer tube rotates to the second position, the second-shield member is operated into the shielding state. 
     
     
       10. The shielding mechanism according to  claim 9 , further comprising two second-position sensors that are disposed adjacent to the main shaft of the shaft seal of the at least one driver for respectively detecting that the main shaft tube has rotated to a third position and detecting that the main shaft has rotated to a fourth position; when the main shaft rotates to the third position, the first-shield member is operated into the open state; and when the main shaft rotates to the fourth position, the first-shield member is operated into the shielding state. 
     
     
       11. The shielding mechanism according to  claim 10 , further comprising a first-tongue unit and a second-tongue unit, wherein the first-tongue unit is connected to the outer tube; the second-tongue unit is connected to the main shaft; the first-tongue unit rotates with the outer tube to be detected by the first-position sensors; and the second-tongue unit rotates with the main shaft to be detected by the second-position sensors. 
     
     
       12. The shielding mechanism according to  claim 8 , wherein each of the first-shield member and the second-shield member is disposed with a plurality of shield positioners; each of the first-connecting arm and the second-connecting arm is disposed with a plurality of arm positioners; the shield positioners of the first-shield member faces the arm positioners of the first-connecting arm, such that to position the first-shield member on the first-connecting arm; and the shield positioners of the second-shield member faces the arm positioners of the second-connecting arm, such that to position the second-shield member on the second-connecting arm. 
     
     
       13. The shielding mechanism according to  claim 12 , wherein the shield positioners of the first-shield member and the second-shield member are pins; and the arm positioners of the first-connecting arm and the second-connecting arm are slots. 
     
     
       14. The shielding mechanism according to  claim 8 , wherein the at least one driver is two as a first driver and a second driver; the shaft seal of the first driver is connected to the first-shield member, and the at least one motor of the first driver drives and swings the first-shield member; the shaft seal of the second driver is connected to the second-shield member, and the at least one motor of the second driver drives and swings the second-shield member; and the first driver and the second driver respectively drives and swings the first-shield member and the second-shield member to move in the opposite direction and to switch into the open state and the shielding state.