Inventor · disambiguated record
Taek Youb Lee
Also filed as: LEE TAEK-YOUB
18 granted patents·4 pending applications·71 citations·filing 2005–2024
90Inventor score
Top patents by PatentIndex Score
22 records- 0191US7611182B2Wafer transfer apparatusSEMES CO LTD·Filed 2005·Granted Nov 3, 2009·32 cites·12 claims
- 0285US8293071B2Spin headLEE TAEK-YOUB·Filed 2008·Granted Oct 23, 2012·15 cites·34 claims
- 0383US8435380B2Substrate chucking member, substrate processing apparatus having the member, and method of processing substrate using the memberKIM BONG JOO·Filed 2009·Granted May 7, 2013·10 cites·16 claims
- 0478US8714169B2Spin head, apparatus for treating substrate, and method for treating substrateLEE TAEK YOUB·Filed 2009·Granted May 6, 2014·8 cites·28 claims
- 0567US8394234B2Spin head and method of chucking substrate using the sameLEE TAEK YOUB·Filed 2009·Granted Mar 12, 2013·3 cites·20 claims
- 0667US8382555B2Substrate supporting unit, and apparatus and method for polishing substrate using the sameSEMES CO LTD·Filed 2009·Granted Feb 26, 2013·3 cites·15 claims
- 0766US12502684B2Substrate treatment apparatus having heating partDEVICE CO LTD·Filed 2024·Granted Dec 23, 2025·0 cites·6 claims
- 0866US12506027B2Substrate treatment apparatus having heating partDEVICE CO LTD·Filed 2024·Granted Dec 23, 2025·0 cites·7 claims
- 0962US2025083160A1Treatment liquid spray nozzleDEVICEENG CO LTD·Filed 2024·Application pending·0 cites
- 1061US12465958B2Ultrasonic cleaning unit with improved cleaning performance, and substrate cleaning apparatus including the sameDEVICE CO LTD·Filed 2023·Granted Nov 11, 2025·0 cites·6 claims
- 1161US2025229279A1Treatment liquid spray nozzleDEVICEENG CO LTD·Filed 2024·Application pending·0 cites
- 1256US2025054802A1Substrate support assembly for substrate treatment apparatusDEVICEENG CO LTD·Filed 2024·Application pending·0 cites
- 1353US12148634B2Device for etching the periphery edge of a substrate comprising substrate sensing unitDEVICEENG CO LTD·Filed 2022·Granted Nov 19, 2024·0 cites·9 claims
- 1451US12237206B2Device for etching the periphery edge of a substrateDEVICEENG CO LTD·Filed 2022·Granted Feb 25, 2025·0 cites·5 claims
- 1551US12170222B2Substrate support assembly for substrate treatment apparatusDEVICEENG CO LTD·Filed 2021·Granted Dec 17, 2024·0 cites·14 claims
- 1650US12396103B2Device for etching the periphery edge of a substrate and method for controlling etching thereofDEVICE CO LTD·Filed 2022·Granted Aug 19, 2025·0 cites·3 claims
- 1750US12115562B2Substrate treatment apparatus having back nozzle assemblyDEVICEENG CO LTD·Filed 2021·Granted Oct 15, 2024·0 cites·11 claims
- 1850US12059713B2Substrate treating apparatus comprising ultrasonic wave cleaning unitDEVICEENG CO LTD·Filed 2022·Granted Aug 13, 2024·0 cites·8 claims
- 1949US12237205B2Substrate support assembly for substrate treatment apparatusDEVICEENG CO LTD·Filed 2021·Granted Feb 25, 2025·0 cites·17 claims
- 2049US12146216B2Substrate treatment apparatus having exhaust structureDEVICEENG CO LTD·Filed 2021·Granted Nov 19, 2024·0 cites·8 claims
- 2148US12308256B2Substrate treatment apparatus having bowl assemblyDEVICEENG CO LTD·Filed 2021·Granted May 20, 2025·0 cites·3 claims
- 2243US2008223412A1Substrate support member and apparatus and method for treating substrate with the sameLEE TAEK-YOUB·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →