Substrate support assembly for substrate treatment apparatus

Abstract

The present disclosure relates to a substrate support assembly for a substrate treatment apparatus, including: a chuck base disposed to face a substrate, when the substrate is installed, and rotatable around a rotational axis; chuck pins protruding from top of the chuck base to hold or separate the substrate thereonto or therefrom; a mechanism being connected to the chuck pins; and driving parts for driving the mechanism, wherein the mechanism may include: first operating parts each having a pusher cam movable ascendably/descendably and restorably in a direction of the rotational axis; a second operating part interlocking with the pusher cams in such a way as to reciprocatingly rotate around the rotational axis; and first restoring members each connecting the chuck base and the second operating part to each other.

What is claimed is: 
     
         1 . A substrate support assembly for a substrate treatment apparatus, comprising:
 a chuck base disposed to face a substrate, when the substrate is installed, and rotatable around a rotational axis;   chuck pins protruding from top of the chuck base to hold or separate the substrate thereonto or therefrom;   a mechanism being connected to the chuck pins; and   driving parts for driving the mechanism,   wherein the mechanism comprises:   first operating parts each having a pusher cam movable ascendably/descendably and restorably in a direction of the rotational axis by means of the driving part;   a second operating part interlocking with the pusher cams performing the ascending/descending movements in such a way as to reciprocatingly rotate around the rotational axis; and   first restoring members each connecting the chuck base and the second operating part to each other in such a way as to allow the second operating part to be restored,   whereby as the second operating part reciprocatingly rotates, the chuck pins interlocking with the second operating part reciprocatingly rotate in place.   
     
     
         2 . The substrate support assembly according to  claim 1 , wherein the mechanism comprises:
 a guide roller rotatably located on the second operating part in such a way as to allow one side surface thereto to face the outer peripheral surface of the second operating part; and   a slant guide surface formed on top of the pusher cam to allow the outer peripheral surface of the guide roller to come into contact therewith.   
     
     
         3 . The substrate support assembly according to  claim 2 , wherein the second operating part has a rack gear on the inner peripheral surface thereof, and each chuck pin has a pinion gear formed on the outer peripheral surface thereof in such a way as to interlock with the rack gear. 
     
     
         4 . The substrate support assembly according to  claim 3 , wherein the second operating part has the shape of a ring, and the rack gear is formed on a stopper protruding outward from the ring-shaped second operating part. 
     
     
         5 . The substrate support assembly according to  claim 2 , wherein the mechanism comprises a moving roller rotatably located on the second operating part in such a way as to allow one side surface thereto to face the outer peripheral surface of the second operating part, and the moving roller protrudes from top of the second operating part in such a way as to come into contact with the chuck base and move therealong. 
     
     
         6 . The substrate support assembly according to  claim 2 , wherein the first operating part comprises:
 a pair of guide rods disposed extending up and down in the chuck base in such a way as to be spaced apart from each other in a circumferential direction of the chuck base with respect to the rotational axis;   the pusher cam movable up and down by means of the pair of guide rods and having the slant guide surface formed on top thereof in such a way as to become increased in height in a restoring direction of the second operating part when the second operating part is restored by means of the first restoring member; and   second restoring members disposed along the extending direction of the guide rods over a space between the chuck base and the pusher cam.   
     
     
         7 . The substrate support assembly according to  claim 2 , wherein the chuck base comprises:
 a chuck support part having the shape of a plate extending in a horizontal direction thereof; and   an accommodation portion formed along the outer periphery of the chuck support part in such a way as to accommodate the mechanism and allow the chuck pins to be located on top thereof.