Inventor · disambiguated record
Tadashi Mitsunari
Also filed as: MITSUNARI TADASHI
6 granted patents·12 pending applications·1 citations·filing 2017–2025
65Inventor score
Files withTOKYO ELECTRON LTD18
Top patents by PatentIndex Score
18 records- 0167US10643839B2Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2017·Granted May 5, 2020·1 cites·20 claims
- 0261US2025357102A1Substrate treatment methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0361US2025171893A1Method of forming carbon-based film and film forming apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0460US2025174462A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0560US2025112036A1Method of forming carbon-containing filmTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0658US2024392432A1Method for forming carbon-containing film, and method for forming hard mask using the carbon-containing filmTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0755US2021301402A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0854US11035741B2Temperature measurement substrate and temperature measurement systemTOKYO ELECTRON LTD·Filed 2017·Granted Jun 15, 2021·0 cites·15 claims
- 0952US12312683B2Substrate processing method and substrate processing deviceTOKYO ELECTRON LTD·Filed 2020·Granted May 27, 2025·0 cites·17 claims
- 1050US2025154645A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1150US2024258086A1Film formation method and film formation apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1249US11721557B2Etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 8, 2023·0 cites·8 claims
- 1349US2024263306A1Film forming method and film forming deviceTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1448US2024044006A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1548US2018155830A1Gas supply and exhaust structureTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1645US2025263830A1Method of forming carbon-based film and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1744US12362143B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jul 15, 2025·0 cites·12 claims
- 1842US11658008B2Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Granted May 23, 2023·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →