Inventor · disambiguated record
Takashi Mitsuya
Also filed as: MITSUYA TAKASHI
15 granted patents·1 pending application·19 citations·filing 2004–2021
87Inventor score
Top patents by PatentIndex Score
16 records- 0170US11177147B2Substrate treatment apparatus, controller of substrate treatment apparatus, method for controlling substrate treatment apparatus, and memory medium storing programEBARA CORP·Filed 2019·Granted Nov 16, 2021·1 cites·16 claims
- 0269US10824135B2Scheduler, substrate processing apparatus, and substrate conveyance methodEBARA CORP·Filed 2018·Granted Nov 3, 2020·1 cites·11 claims
- 0369US8128458B2Polishing apparatus and substrate processing methodSAITO KENICHIRO·Filed 2005·Granted Mar 6, 2012·4 cites·7 claims
- 0469US8025759B2Polishing apparatus and polishing methodEBARA CORP·Filed 2004·Granted Sep 27, 2011·12 cites·19 claims
- 0561US11099546B2Scheduler, substrate processing apparatus, and substrate conveyance methodEBARA CORP·Filed 2020·Granted Aug 24, 2021·0 cites·6 claims
- 0661US8398811B2Polishing apparatus and polishing methodSASAKI TATSUYA·Filed 2011·Granted Mar 19, 2013·1 cites·4 claims
- 0756US11098414B2Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control methodEBARA CORP·Filed 2019·Granted Aug 24, 2021·0 cites·12 claims
- 0854US11911868B2Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing methodEBARA CORP·Filed 2021·Granted Feb 27, 2024·0 cites·15 claims
- 0952US10141211B2Substrate processing apparatus and substrate transfer methodEBARA CORP·Filed 2017·Granted Nov 27, 2018·0 cites·11 claims
- 1050US10501862B2Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control methodEBARA CORP·Filed 2017·Granted Dec 10, 2019·0 cites·12 claims
- 1149US9786532B2Substrate processing apparatus and method of transferring a substrateEBARA CORP·Filed 2015·Granted Oct 10, 2017·0 cites·12 claims
- 1246US12237194B2Substrate transporter and substrate processing apparatus including substrate transporterEBARA CORP·Filed 2019·Granted Feb 25, 2025·0 cites·29 claims
- 1346US8202139B2Method of operating substrate processing apparatus and substrate processing apparatusTORII HIROOMI·Filed 2009·Granted Jun 19, 2012·0 cites·7 claims
- 1443US8550875B2Method of operating substrate processing apparatus and substrate processing apparatusTORII HIROOMI·Filed 2012·Granted Oct 8, 2013·0 cites·8 claims
- 1541US10824138B2Scheduler, substrate processing apparatus, and substrate conveyance methodEBARA CORP·Filed 2019·Granted Nov 3, 2020·0 cites·11 claims
- 1633US2015270147A1Substrate processing apparatus and resist removing unitEBARA CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →