Inventor · disambiguated record
Takahito Mukawa
Also filed as: MUKAWA TAKAHITO
2 granted patents·2 pending applications·0 citations·filing 2010–2018
23Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0141US10381238B2Process for performing self-limited etching of organic materialsTOKYO ELECTRON LTD·Filed 2018·Granted Aug 13, 2019·0 cites·19 claims
- 0234US2013023120A1Method of forming mask pattern and method of manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 0320US2010224587A1Plasma etching method, plasma etching apparatus and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0419US8283254B2Etching method and etching apparatusMUKAWA TAKAHITO·Filed 2010·Granted Oct 9, 2012·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →