Inventor · disambiguated record
Tamal Mukherjee
Also filed as: MUKHERJEE TAMAL
8 granted patents·7 pending applications·21 citations·filing 2018–2025
80Inventor score
Top patents by PatentIndex Score
15 records- 0196US10763083B2High energy atomic layer etchingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·15 cites·22 claims
- 0288US11935758B2Atomic layer etching for subtractive metal etchLAM RES CORP·Filed 2020·Granted Mar 19, 2024·2 cites·7 claims
- 0384US11450513B2Atomic layer etching and smoothing of refractory metals and other high surface binding energy materialsLAM RES CORP·Filed 2019·Granted Sep 20, 2022·3 cites·7 claims
- 0484US2025379042A1Method of cleaning chamber components with metal etch residuesLAM RES CORP·Filed 2025·Application pending·0 cites
- 0583US12080562B2Atomic layer etch and ion beam etch patterningLAM RES CORP·Filed 2020·Granted Sep 3, 2024·1 cites·16 claims
- 0681US12266542B2Atomic layer etching for subtractive metal etchLAM RES CORP·Filed 2024·Granted Apr 1, 2025·0 cites·9 claims
- 0777US2024274408A1High energy atomic layer etchingLAM RES CORP·Filed 2024·Application pending·0 cites
- 0872US2025191934A1Atomic layer etching for subtractive metal etchLAM RES CORP·Filed 2025·Application pending·0 cites
- 0971US12400842B2Method of cleaning chamber components with metal etch residuesLAM RES CORP·Filed 2021·Granted Aug 26, 2025·0 cites·11 claims
- 1066US12417902B2Method for cleaning a chamberLAM RES CORP·Filed 2021·Granted Sep 16, 2025·0 cites·22 claims
- 1166US2022392747A1Atomic layer etching and smoothing of refractory metals and other high surface binding energy materialsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1263US2020402770A1High energy atomic layer etchingLAM RES CORP·Filed 2020·Application pending·0 cites
- 1354US2024302185A1System, Method, and Apparatus for Sensor Drift CompensationUNIV CARNEGIE MELLON·Filed 2022·Application pending·0 cites
- 1449US2024021435A1Metal etchLAM RES CORP·Filed 2021·Application pending·0 cites
- 1545US12256645B2Chemical etch nonvolatile materials for MRAM patterningLAM RES CORP·Filed 2020·Granted Mar 18, 2025·0 cites·23 claims
Join the waitlist — get patent alerts
Get an alert when Tamal Mukherjee files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →