Inventor · disambiguated record

Tadakazu Murai

Also filed as: MURAI TADAKAZU

1 granted patent·1 citations·filing 2008–2008

16Inventor score

Technology areasH10P

Files withISHIKAWA HIRAKU1

Top patents by PatentIndex Score

1 record

0155US8409460B2Forming method of amorphous carbon film, amorphous carbon film, multilayer resist film, manufacturing method of semiconductor device, and computer-readable storage mediumISHIKAWA HIRAKU·Filed 2008·Granted Apr 2, 2013·1 cites·7 claims

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