Inventor · disambiguated record
Tatsuya Nagamatsu
Also filed as: NAGAMATSU TATSUYA
4 granted patents·3 pending applications·10 citations·filing 2012–2024
64Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0178US9192878B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Nov 24, 2015·5 cites·13 claims
- 0277US10236192B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Mar 19, 2019·5 cites·11 claims
- 0360US2025140581A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0451US2025054783A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0542US9321085B2Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Apr 26, 2016·0 cites·7 claims
- 0640US2014377463A1Liquid processing method, liquid processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0731US9862007B2Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded thereinTOKYO ELECTRON LTD·Filed 2015·Granted Jan 9, 2018·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →