Inventor · disambiguated record
Tadayasu Nishikawa
Also filed as: NISHIKAWA TADAYASU
4 granted patents·2 pending applications·2 citations·filing 2002–2023
57Inventor score
Top patents by PatentIndex Score
6 records- 0157US2024091825A1Cleaning apparatus, cleaning method, imprint apparatus, and method for manufacturing an articleCANON KK·Filed 2023·Application pending·0 cites
- 0253US7626680B2Exposure apparatus and device fabrication method using the sameCANON KK·Filed 2008·Granted Dec 1, 2009·0 cites·2 claims
- 0348US7073185B2Objective lens driving device and optical pickup device employing the objective lens driving deviceSONY CORP·Filed 2002·Granted Jul 4, 2006·2 cites·10 claims
- 0442US11520226B2Imprint method, imprint apparatus, imprint system, and method of manufacturing articleCANON KK·Filed 2018·Granted Dec 6, 2022·0 cites·13 claims
- 0540US7864337B2Positioning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Jan 4, 2011·0 cites·14 claims
- 0638US2005052633A1Exposure apparatus and device fabrication method using the sameFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →