Inventor · disambiguated record
Takanori Obaru
Also filed as: OBARU TAKANORI
5 granted patents·3 pending applications·1 citations·filing 2018–2024
63Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0178US12230515B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Granted Feb 18, 2025·0 cites·4 claims
- 0272US11139182B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Oct 5, 2021·1 cites·12 claims
- 0368US11887869B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 30, 2024·0 cites·4 claims
- 0457US2025010341A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0553US2024162052A1Substrate processing apparatus, substrate processing method, and substrateTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0646US2024321600A1Substrate liquid processing apparatus and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0742US11482429B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Oct 25, 2022·0 cites·19 claims
- 0833US11084072B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Aug 10, 2021·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →