Inventor · disambiguated record

Tadashi Obo

Also filed as: OBO TADASHI

1 granted patent·1 pending application·4 citations·filing 2014–2015

24Inventor score

Technology areasB24B

Files withEBARA CORP2

Top patents by PatentIndex Score

2 records

0175US9242339B2Polishing apparatus and polishing methodEBARA CORP·Filed 2014·Granted Jan 26, 2016·4 cites·20 claims
0235US2015346088A1Method and apparatus for judging polishing performance of polishing liquidEBARA CORP·Filed 2015·Application pending·0 cites

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