Inventor · disambiguated record
Tadahiro Ohmi
Also filed as: OHMI TADAHIRO
598 granted patents·195 pending applications·14,054 citations·filing 1978–2016
99Inventor score
Top patents by PatentIndex Score
793 records- 0199US6035893AShutoff-opening devices and fluid control apparatus comprising such devicesOHMI TADAHIRO·Filed 1997·Granted Mar 14, 2000·143 cites·6 claims
- 0298US6446573B2Plasma process deviceOHMI TADAHIRO·Filed 2001·Granted Sep 10, 2002·572 cites·13 claims
- 0398US6343239B1Transportation method for substrate wafers and transportation apparatusNIPPON OXYGEN CO LTD·Filed 1997·Granted Jan 29, 2002·360 cites·6 claims
- 0498US5272417ADevice for plasma processOHMI TADAHIRO·Filed 1990·Granted Dec 21, 1993·287 cites·3 claims
- 0597US8716114B2Semiconductor device manufacturing method and semiconductor deviceTOKYO ELECTRON LTD·Filed 2013·Granted May 6, 2014·40 cites·5 claims
- 0697US8114245B2Plasma etching deviceOHMI TADAHIRO·Filed 2002·Granted Feb 14, 2012·157 cites·12 claims
- 0797US6792889B2Plasma processing apparatus and method capable of performing uniform plasma treatment by control of excitation powerALPS ELECTRIC CO LTD·Filed 2003·Granted Sep 21, 2004·179 cites·19 claims
- 0897US6615871B2Fluid control apparatusTADAHIRO OHMI·Filed 2002·Granted Sep 9, 2003·61 cites·12 claims
- 0997US6585851B1Plasma etching deviceOHMI TADAHIRO·Filed 1998·Granted Jul 1, 2003·178 cites·26 claims
- 1097US6257270B1Fluid control deviceOHMI TADAHIRO·Filed 1999·Granted Jul 10, 2001·91 cites·1 claims
- 1197US5769110AFluid control apparatusFUJIKIN KK·Filed 1996·Granted Jun 23, 1998·85 cites·2 claims
- 1297US4558660ASemiconductor fabricating apparatusHANDOTAI KENKYU SHINKOKAI·Filed 1983·Granted Dec 17, 1985·148 cites·4 claims
- 1396US6830652B1Microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 14, 2004·84 cites·13 claims
- 1496US5975112AFluid control deviceOHMI TADAHIRO·Filed 1997·Granted Nov 2, 1999·85 cites·4 claims
- 1596US5953591AProcess for laser detection of gas and contaminants in a wafer transport gas tunnelNIPPON OXYGEN CO LTD·Filed 1996·Granted Sep 14, 1999·217 cites·13 claims
- 1696US5816285APressure type flow rate control apparatusFUJIKIN KK·Filed 1997·Granted Oct 6, 1998·139 cites·6 claims
- 1796US5384476AShort channel MOSFET with buried anti-punch through regionZAIDAN HOJIN HANDOTAI KENKYU·Filed 1987·Granted Jan 24, 1995·139 cites·19 claims
- 1896US4828219AMetal diaphragm valveMOTOYAMA ENG WORKS·Filed 1987·Granted May 9, 1989·108 cites·16 claims
- 1995US6551948B2Flash memory device and a fabrication process thereof, method of forming a dielectric filmOHMI TADAHIRO·Filed 2001·Granted Apr 22, 2003·57 cites·16 claims
- 2095US6350376B1Reductive heat exchange water and heat exchange system using such waterORGANO CORP·Filed 2000·Granted Feb 26, 2002·63 cites·13 claims
- 2195US6230722B1Liquid feed nozzle, wet treatment, apparatus and wet treatment methodALPS ELECTRIC CO LTD·Filed 1998·Granted May 15, 2001·172 cites·11 claims
- 2295US5009963AMetal material with film passivated by fluorination and apparatus composed of the metal materialOHMI TADAHIRO·Filed 1989·Granted Apr 23, 1991·71 cites·6 claims
- 2395US4824546ASemiconductor manufacturing apparatusOHMI TADAHIRO·Filed 1987·Granted Apr 25, 1989·67 cites·12 claims
- 2494US8724974B2VaporizerOHMI TADAHIRO·Filed 2012·Granted May 13, 2014·9 cites·16 claims
- 2594US8146924B2Low-compression force metal gasketsOHMI TADAHIRO·Filed 2008·Granted Apr 3, 2012·22 cites·7 claims
- 2694US7663195B2P-channel power MIS field effect transistor and switching circuitOHMI TADAHIRO·Filed 2005·Granted Feb 16, 2010·31 cites·17 claims
- 2794US6422264B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2000·Granted Jul 23, 2002·64 cites·5 claims
- 2894US6255731B1SOI bonding structureCANON KK·Filed 1998·Granted Jul 3, 2001·179 cites·58 claims
- 2994US5983933AShutoff-opening deviceOHMI TADAHIRO·Filed 1997·Granted Nov 16, 1999·85 cites·4 claims
- 3094US4686554APhotoelectric converterCANON KK·Filed 1984·Granted Aug 11, 1987·72 cites·74 claims
- 3193US8399862B2Ion implanting apparatus and ion implanting methodOHMI TADAHIRO·Filed 2007·Granted Mar 19, 2013·20 cites·19 claims
- 3293US8372200B2Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing methodTOKYO ELECTRON LTD·Filed 2007·Granted Feb 12, 2013·14 cites·7 claims
- 3393US7258725B2Gas supplying method and systemTAIYO NIPPON SANSO CORP·Filed 2002·Granted Aug 21, 2007·67 cites·5 claims
- 3493US7095178B2Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing methodALPS ELECTRIC CO LTD·Filed 2002·Granted Aug 22, 2006·58 cites·22 claims
- 3593US6039360ACouplings for fluid controllersOHMI TADAHIRO·Filed 1998·Granted Mar 21, 2000·82 cites·6 claims
- 3693US5110438AReduced pressure surface treatment apparatusOHMI TADAHIRO·Filed 1989·Granted May 5, 1992·113 cites·3 claims
- 3793US4874494ASemiconductor manufacturing apparatusOHMI TADAHIRO·Filed 1987·Granted Oct 17, 1989·81 cites·5 claims
- 3893US4644386AIntegrated circuit employing insulated gate electrostatic induction transistorHANDOTAI KENKYU SHINKOKAI·Filed 1983·Granted Feb 17, 1987·67 cites·27 claims
- 3992US8188372B2Flex-rigid printed wiring board and manufacturing method thereofSATO AKIHIRO·Filed 2006·Granted May 29, 2012·23 cites·6 claims
- 4092US6975018B2Semiconductor deviceOHMI TADAHIRO·Filed 2001·Granted Dec 13, 2005·49 cites·4 claims
- 4192US6394415B1Fluid control valve and fluid supply/exhaust systemOHMI TADAHIRO·Filed 2000·Granted May 28, 2002·43 cites·18 claims
- 4292US6357385B1Plasma deviceOHMI TADAHIRO·Filed 1998·Granted Mar 19, 2002·124 cites·33 claims
- 4392US5021843ASemiconductor integrated circuitOHMI TADAHIRO·Filed 1989·Granted Jun 4, 1991·68 cites·8 claims
- 4491US9230799B2Method for fabricating semiconductor device and the semiconductor deviceTERAMOTO AKINOBU·Filed 2012·Granted Jan 5, 2016·14 cites·11 claims
- 4591US8733281B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted May 27, 2014·5 cites·16 claims
- 4691US8124240B2Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structureOHMI TADAHIRO·Filed 2006·Granted Feb 28, 2012·10 cites·10 claims
- 4791US7521324B2Semiconductor device and method for manufacturing the sameOHMI TADAHIRO·Filed 2004·Granted Apr 21, 2009·51 cites·11 claims
- 4891US7315064B2Bonded wafer and method of producing bonded waferSHINETSU HANDOTAI KK·Filed 2005·Granted Jan 1, 2008·20 cites·5 claims
- 4991US7012311B2Semiconductor device formed on (111) surface of a Si crystal and fabrication process thereofTOKYO ELECTRON LTD·Filed 2001·Granted Mar 14, 2006·45 cites·14 claims
- 5091US6958094B2Single crystal cutting methodSHINETSU HANDOTAI KK·Filed 2001·Granted Oct 25, 2005·56 cites·12 claims
Showing the top 50 of 793 patent records by PatentIndex Score.
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