Inventor · disambiguated record
Takafumi Okabe
Also filed as: OKABE TAKAFUMI
30 granted patents·5 pending applications·727 citations·filing 1985–2012
98Inventor score
Top patents by PatentIndex Score
35 records- 0198US7388979B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 17, 2008·136 cites·22 claims
- 0295US8005292B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Aug 23, 2011·17 cites·10 claims
- 0395US7127126B2Image alignment method, comparative inspection method, and comparative inspection device for comparative inspectionsHITACHI LTD·Filed 2005·Granted Oct 24, 2006·29 cites·14 claims
- 0494US6799130B2Inspection method and its apparatus, inspection systemHITACHI LTD·Filed 2002·Granted Sep 28, 2004·56 cites·26 claims
- 0593US8275190B2Method and apparatus for inspecting pattern defectsSAKAI KAORU·Filed 2011·Granted Sep 25, 2012·13 cites·10 claims
- 0693US6900888B2Method and apparatus for inspecting a pattern formed on a substrateHITACHI HIGH TECH CORP·Filed 2003·Granted May 31, 2005·38 cites·23 claims
- 0792US7792352B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 7, 2010·17 cites·29 claims
- 0891US7330248B2Method and apparatus for inspecting defectsHITACHI LTD·Filed 2005·Granted Feb 12, 2008·15 cites·15 claims
- 0990US7020350B2Image alignment method, comparative inspection method, and comparative inspection device for comparative inspectionsHITACHI LTD·Filed 2001·Granted Mar 28, 2006·42 cites·20 claims
- 1089US7372561B2Method and apparatus for inspecting defects and a system for inspecting defectsHITACHI HIGH TECH CORP·Filed 2005·Granted May 13, 2008·15 cites·15 claims
- 1189US7110105B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2005·Granted Sep 19, 2006·10 cites·7 claims
- 1288US7333677B2Image alignment method, comparative inspection method, and comparative inspection device for comparative inspectionsHITACHI LTD·Filed 2006·Granted Feb 19, 2008·12 cites·10 claims
- 1388US6927847B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2002·Granted Aug 9, 2005·24 cites·28 claims
- 1488US6841403B2Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect dataHITACHI LTD·Filed 2003·Granted Jan 11, 2005·35 cites·17 claims
- 1586US8639019B2Method and apparatus for inspecting pattern defectsSAKAI KAORU·Filed 2012·Granted Jan 28, 2014·6 cites·8 claims
- 1684US7508973B2Method of inspecting defectsHITACHI HIGH TECH CORP·Filed 2004·Granted Mar 24, 2009·37 cites·10 claims
- 1783US6879392B2Method and apparatus for inspecting defectsHITACHI LTD·Filed 2002·Granted Apr 12, 2005·19 cites·19 claims
- 1882US7433508B2Pattern inspection method and its apparatusHITACHI HIGH TECH CORP·Filed 2004·Granted Oct 7, 2008·21 cites·15 claims
- 1982US7142708B2Defect detection method and its apparatusHITACHI LTD·Filed 2002·Granted Nov 28, 2006·31 cites·23 claims
- 2082US6797526B2Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect dataHITACHI LTD·Filed 2002·Granted Sep 28, 2004·23 cites·12 claims
- 2182US4731853AThree-dimensional vision systemHITACHI LTD·Filed 1985·Granted Mar 15, 1988·88 cites·25 claims
- 2280US7949178B2Pattern inspection method and its apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted May 24, 2011·7 cites·9 claims
- 2378US7646477B2Method and apparatus for inspecting a pattern formed on a substrateHITACHI HIGH TECH CORP·Filed 2005·Granted Jan 12, 2010·4 cites·12 claims
- 2477US7903249B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2009·Granted Mar 8, 2011·3 cites·18 claims
- 2575US8090187B2Pattern inspection method and its apparatusSAKAI KAORU·Filed 2010·Granted Jan 3, 2012·3 cites·7 claims
- 2675US7711178B2Pattern inspection method and its apparatusHITACHI LTD·Filed 2007·Granted May 4, 2010·5 cites·16 claims
- 2775US6566671B1Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit thereforHITACHI LTD·Filed 2000·Granted May 20, 2003·13 cites·41 claims
- 2874US8253934B2Method and apparatus for inspecting a pattern formed on a substrateYOSHIDA MINORU·Filed 2009·Granted Aug 28, 2012·2 cites·16 claims
- 2969US7869966B2Inspection method and its apparatus, inspection systemHITACHI LTD·Filed 2004·Granted Jan 11, 2011·6 cites·22 claims
- 3057US7489395B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2006·Granted Feb 10, 2009·0 cites·22 claims
- 3151US2009169093A1Pattern inspection method and its apparatusSAKAI KAORU·Filed 2009·Application pending·0 cites
- 3251US2012076396A1Pattern inspection method and its apparatusSAKAI KAORU·Filed 2011·Application pending·0 cites
- 3351US2009226076A1Pattern inspection method and its apparatusSAKAI KAORU·Filed 2009·Application pending·0 cites
- 3448US2007133863A1Image Alignment Method, Comparative Inspection Method, and Comparative Inspection Device for Comparative InspectionsHITACHI LTD·Filed 2006·Application pending·0 cites
- 3542US2003179921A1Pattern inspection method and its apparatusFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →