Inventor · disambiguated record

Tatsuhiro Okabe

Also filed as: OKABE TATSUHIRO

2 granted patents·1,004 citations·filing 2013–2013

76Inventor score

Technology areasB08B C23C

Files withASM IP HOLDING BV2

Top patents by PatentIndex Score

2 records

0196US9556516B2Method for forming Ti-containing film by PEALD using TDMAT or TDEATASM IP HOLDING BV·Filed 2013·Granted Jan 31, 2017·483 cites·8 claims
0296US9142393B2Method for cleaning reaction chamber using pre-cleaning processASM IP HOLDING BV·Filed 2013·Granted Sep 22, 2015·521 cites·15 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →