Inventor · disambiguated record
Takuji Okada
Also filed as: OKADA TAKUJI
7 granted patents·1 pending application·80 citations·filing 1988–2013
84Inventor score
Top patents by PatentIndex Score
8 records- 0182US9607868B2Substrate heat treatment apparatusCANON ANELVA CORP·Filed 2013·Granted Mar 28, 2017·6 cites·3 claims
- 0280US7220319B2Electrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted May 22, 2007·25 cites·18 claims
- 0378US7175737B2Electrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted Feb 13, 2007·23 cites·9 claims
- 0466USRE42175EElectrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2009·Granted Mar 1, 2011·2 cites·26 claims
- 0562US4929501AThermal transfer mediumSTAMICARBON·Filed 1988·Granted May 29, 1990·19 cites·8 claims
- 0656US7513063B2Substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted Apr 7, 2009·5 cites·16 claims
- 0754US7976716B2Semiconductor device manufacturing methodCANON ANELVA CORP·Filed 2009·Granted Jul 12, 2011·0 cites·1 claims
- 0837US2011253037A1Vacuum heating and cooling apparatusCANON ANELVA CORP·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →