Inventor · disambiguated record
Taku Omori
Also filed as: OMORI TAKU
7 granted patents·2 pending applications·491 citations·filing 2013–2024
80Inventor score
Files withASM IP HOLDING BV9
Top patents by PatentIndex Score
9 records- 0197US8790743B1Method for controlling cyclic plasma-assisted processASM IP HOLDING BV·Filed 2013·Granted Jul 29, 2014·485 cites·18 claims
- 0279US2025132140A1Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-catASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0374US10332767B2Substrate transport device and substrate processing apparatusASM IP HOLDING BV·Filed 2015·Granted Jun 25, 2019·2 cites·17 claims
- 0474US9778941B2Substrate processing system, storage medium and method of registering new deviceASM IP HOLDING BV·Filed 2014·Granted Oct 3, 2017·4 cites·15 claims
- 0572US12217946B2Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-CATASM IP HOLDING BV·Filed 2021·Granted Feb 4, 2025·0 cites·8 claims
- 0652US10331115B2Substrate processing system, storage medium and data processing methodASM IP HOLDING BV·Filed 2016·Granted Jun 25, 2019·0 cites·11 claims
- 0749US2023203654A1Semiconductor substrate processing apparatus and the method thereofASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0848US11940785B2Method for predicting maintenance for components used in substrate treatments, and predictive maintenance deviceASM IP HOLDING BV·Filed 2021·Granted Mar 26, 2024·0 cites·17 claims
- 0941US9747092B2Substrate processing system and method of installing PLC softwareASM IP HOLDING BV·Filed 2015·Granted Aug 29, 2017·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →