Inventor · disambiguated record
Taner Ozel
Also filed as: OZEL TANER
0 granted patents·7 pending applications·0 citations·filing 2018–2023
Technology areasH10P
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0151US2025277148A1Organochloride etch with passivation and profile controlLAM RES CORP·Filed 2023·Application pending·0 cites
- 0250US2025308919A1Simultaneous dielectric etch with metal passivationLAM RES CORP·Filed 2023·Application pending·0 cites
- 0348US2024429063A1Silicon etch with organochlorideLAM RES CORP·Filed 2022·Application pending·0 cites
- 0447US2025095964A1Method to control etch profile by rf pulsingLAM RES CORP·Filed 2022·Application pending·0 cites
- 0545US2023298896A1Metal-based liner protection for high aspect ratio plasma etchLAM RES CORP·Filed 2022·Application pending·0 cites
- 0644US2023230807A1Control of mask cdLAM RES CORP·Filed 2022·Application pending·0 cites
- 0741US2018286642A1Electrostatic chuck with flexible wafer temperature controlLAM RES CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →