Inventor · disambiguated record
Takuji Sako
Also filed as: SAKO TAKUJI
1 granted patent·3 pending applications·0 citations·filing 2008–2025
8Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0147US2025285875A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0241US2008184543A1Method and apparatus for manufacturing semiconductor device, and storage medium for executing the methodTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0337US2009017621A1Manufacturing method for semiconductor device and manufacturing device of semiconductor deviceTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0429US10153172B2Etching method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Dec 11, 2018·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →