Inventor · disambiguated record
Tamil Sakthivel
Also filed as: SAKTHIVEL TAMIL · SAKTHIVEL TAMIL SELVAN
0 granted patents·3 pending applications·0 citations·filing 2024–2025
Files withENTEGRIS INC3
Top patents by PatentIndex Score
3 records- 0163US2025376604A1Silica-based slurry for selective polishing of silicon nitride and silicon carbideENTEGRIS INC·Filed 2025·Application pending·0 cites
- 0261US2025376610A1Silica-based slurry for selective polishing of silicon carbideENTEGRIS INC·Filed 2025·Application pending·0 cites
- 0355US2025075104A1Titanium oxide-based chemical-mechanical polishing composition for heavily-doped boron silicon filmsENTEGRIS INC·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →