Inventor · disambiguated record
Takahiro Shimoda
Also filed as: SHIMODA TAKAHIRO
5 granted patents·366 citations·filing 1996–2005
83Inventor score
Top patents by PatentIndex Score
5 records- 0196US6716477B1Method and apparatus for monitoring process exhaust gas, semiconductor-manufacturing device and method and system for managing semiconductor-manufacturing deviceTOKYO ELECTRON LTD·Filed 2000·Granted Apr 6, 2004·310 cites·19 claims
- 0280US7229843B2Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing deviceTOKYO ELECTRON LTD·Filed 2005·Granted Jun 12, 2007·3 cites·19 claims
- 0367US5704981AProcessing apparatus for substrates to be processedTOKYO ELECTRON LTD·Filed 1996·Granted Jan 6, 1998·34 cites·6 claims
- 0464US6942891B2Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing deviceTOKYO ELECTRON LTD·Filed 2004·Granted Sep 13, 2005·5 cites·14 claims
- 0543US6805135B1Cleaning fluid and cleaning method for component of semiconductor-treating apparatusNITTOU CHEMICAL IND LTD·Filed 1999·Granted Oct 19, 2004·14 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →