Inventor · disambiguated record
Takahiro Shirahata
Also filed as: SHIRAHATA TAKAHIRO
16 granted patents·5 pending applications·27 citations·filing 2006–2015
88Inventor score
Files withSHIRAHATA TAKAHIRO5ORITA HIROYUKI4TOSHIBA MITSUBISHI ELEC IND4TOSHIBA MITSUBISHI ELEC INC3TOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP3
Top patents by PatentIndex Score
21 records- 0181US8552444B2Semiconductor light-emitting device and manufacturing method of the sameIDE YOSHIYUKI·Filed 2008·Granted Oct 8, 2013·15 cites·7 claims
- 0280US7691203B2Film forming apparatusAIR WATER INC·Filed 2006·Granted Apr 6, 2010·4 cites·8 claims
- 0378US10016785B2Oxide film deposition method and oxide film deposition deviceORITA HIROYUKI·Filed 2011·Granted Jul 10, 2018·2 cites·13 claims
- 0478US9279182B2Apparatus for forming metal oxide film, method for forming metal oxide film, and metal oxide filmSHIRAHATA TAKAHIRO·Filed 2010·Granted Mar 8, 2016·2 cites·7 claims
- 0565US11075318B2Buffer layer film-forming method and buffer layerTOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP·Filed 2014·Granted Jul 27, 2021·0 cites·6 claims
- 0664US10121931B2Film formation deviceORITA HIROYUKI·Filed 2011·Granted Nov 6, 2018·2 cites·10 claims
- 0763US10118191B2Film forming apparatusTOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP·Filed 2014·Granted Nov 6, 2018·1 cites·27 claims
- 0863US9103028B2Method for forming metal oxide film, metal oxide film, and apparatus for forming metal oxide filmORITA HIROYUKI·Filed 2009·Granted Aug 11, 2015·0 cites·19 claims
- 0961US10456802B2Atomizing apparatusTOSHIBA MITSUBISHI ELEC IND·Filed 2013·Granted Oct 29, 2019·1 cites·13 claims
- 1057US2016047049A1Apparatus for forming metal oxide film, method for forming metal oxide film, and metal oxide filmTOSHIBA MITSUBISHI ELEC INC·Filed 2015·Application pending·0 cites
- 1154US10458017B2Film-forming apparatus to form a film on a substrateTOSHIBA MITSUBISHI ELEC IND·Filed 2012·Granted Oct 29, 2019·0 cites·12 claims
- 1254US9954135B2Solar cell manufacturing methodTOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP·Filed 2013·Granted Apr 24, 2018·0 cites·1 claims
- 1354US2011151619A1Method of forming metal oxide film and apparatus for forming metal oxide filmTOSHIBA MITSUBISHI ELEC INC·Filed 2008·Application pending·0 cites
- 1452US10351957B2Method for producing metal oxide film and metal oxide filmSHIRAHATA TAKAHIRO·Filed 2012·Granted Jul 16, 2019·0 cites·7 claims
- 1552US2016047037A1Film formation methodTOSHIBA MITSUBISHI ELEC INC·Filed 2013·Application pending·0 cites
- 1649US10544509B2Film forming deviceTOSHIBA MITSUBISHI ELEC IND·Filed 2015·Granted Jan 28, 2020·0 cites·15 claims
- 1749US2015010464A1Method for producing metal oxide film and metal oxide filmSHIRAHATA TAKAHIRO·Filed 2012·Application pending·0 cites
- 1848US9574271B2Method for forming metal oxide film, metal oxide film and apparatus for forming metal oxide filmORITA HIROYUKI·Filed 2009·Granted Feb 21, 2017·0 cites·12 claims
- 1945US2015076422A1Method for producing metal oxide film and metal oxide filmSHIRAHATA TAKAHIRO·Filed 2012·Application pending·0 cites
- 2043US11124877B2Film forming device including a detachable bottom plate for forming a film on a substrateTOSHIBA MITSUBISHI ELEC IND·Filed 2015·Granted Sep 21, 2021·0 cites·18 claims
- 2143US9598768B2Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide filmSHIRAHATA TAKAHIRO·Filed 2008·Granted Mar 21, 2017·0 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →