Apparatus for forming metal oxide film, method for forming metal oxide film, and metal oxide film

Abstract

A method for forming a metal oxide film, the method including: forming a source solution containing metal into a mist, heating a substrate, supplying the source solution formed into a mist onto a first main surface of the substrate through a first supply path, and supplying hydrogen peroxide through a second path different from the first supply path onto the first main surface of the substrate, where the method further includes, in the following order, preliminarily preparing data showing a relationship among a molar ratio of an amount of the hydrogen peroxide to an amount of the zinc in the source solution, a carrier concentration of the metal oxide film, and a mobility of the metal oxide film, determining an amount of the hydrogen peroxide supplied with the data, and supplying the determined amount of the hydrogen peroxide through the second path onto the first main surface of the substrate.

1 . A method for forming a metal oxide film, the method comprising:
 forming a source solution comprising metal into a mist;   heating a substrate;   supplying the source solution formed into a mist onto a first main surface of the substrate in the heating, through a first supply path; and   supplying hydrogen peroxide through a second path different from the first supply path onto the first main surface of the substrate in the heating,   wherein the method further comprises, in the following order:   preliminarily preparing data showing a relationship among a molar ratio of an amount of the hydrogen peroxide to an amount of the zinc in the source solution, a carrier concentration of the metal oxide film, and a mobility of the metal oxide film;   determining an amount of the hydrogen peroxide supplied with the data, and   supplying the determined amount of the hydrogen peroxide through the second path onto the first main surface of the substrate,   wherein   the substrate is arranged under atmospheric pressure,   the source solution is converted into a mist by an ultrasonic atomizer, and   the metal is zinc.   
     
     
         2 - 3 . (canceled) 
     
     
         4 . The method according to  claim 1 , wherein the source solution further comprises ammonia. 
     
     
         5 . The method according to  claim 1 , wherein the source solution further comprises ethylenediamine. 
     
     
         6 . The method according to  claim 1 , further comprising supplying ozone onto the first main surface of the substrate in the heating. 
     
     
         7 . The method according to claim  2 , wherein
 the supplying of the source solution and the supplying of hydrogen peroxide do not comprise supplying ozone onto the first main surface of the substrate in the heating, and   the molar ratio is 20 or smaller.   
     
     
         8 . The method according to  claim 1 , wherein the supplying of the hydrogen peroxide further comprises supplying a dopant of a predetermined conductivity type onto the first main surface of the substrate with the hydrogen peroxide through the second path. 
     
     
         9 . The method of  claim 1 , wherein the source solution comprises boron, nitrogen, fluorine, aluminum, phosphorus, gallium, arsenic, niobium, indium, antimony, bismuth, vanadium, tantalum, or any combination thereof. 
     
     
         10 . The method of  claim 1 , wherein the source solution comprises water, an alcohol, or a mixed solution thereof.