Inventor · disambiguated record
Taketoshi Tomioka
Also filed as: TOMIOKA TAKETOSHI
5 granted patents·5 pending applications·3 citations·filing 2014–2025
65Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0171US10714370B2Mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 14, 2020·3 cites·13 claims
- 0267US11521886B2Substrate processing apparatus and substrate supportTOKYO ELECTRON LTD·Filed 2020·Granted Dec 6, 2022·0 cites·16 claims
- 0360US2025357173A1Electrostatic chuckTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0459US10825709B2Electrostatic chucking method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 3, 2020·0 cites·18 claims
- 0559US2021316416A1Focus ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0651US10269607B2Electrostatic chucking method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Apr 23, 2019·0 cites·20 claims
- 0745US2017066103A1Focus ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0845US2021319987A1Edge ring, stage and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0944US12165896B2Substrate support and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 10, 2024·0 cites·12 claims
- 1036US2018182635A1Focus ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →