Inventor · disambiguated record
Takayuki Tomoeda
Also filed as: TOMOEDA TAKAYUKI
11 granted patents·633 citations·filing 1992–1997
94Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD11
Top patents by PatentIndex Score
11 records- 0194US5871584AProcessing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1997·Granted Feb 16, 1999·162 cites·15 claims
- 0288US5779796AResist processing method and apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jul 14, 1998·95 cites·5 claims
- 0386US5965200AProcessing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1997·Granted Oct 12, 1999·73 cites·7 claims
- 0484US5626913AResist processing method and apparatusTOKYO ELECTRON LTD·Filed 1995·Granted May 6, 1997·67 cites·8 claims
- 0580US5345639ADevice and method for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1993·Granted Sep 13, 1994·67 cites·9 claims
- 0676US5518552AMethod for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1994·Granted May 21, 1996·54 cites·10 claims
- 0776US5488964AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1992·Granted Feb 6, 1996·45 cites·9 claims
- 0866US5782990AMethod for washing objectsTOKYO ELECTRON LTD·Filed 1997·Granted Jul 21, 1998·23 cites·4 claims
- 0964US5887604AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1996·Granted Mar 30, 1999·21 cites·6 claims
- 1064US5671764AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1995·Granted Sep 30, 1997·21 cites·15 claims
- 1136US5759614AResist processing method and apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jun 2, 1998·5 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →