Inventor · disambiguated record
Ta-Shan Tseng
Also filed as: TSENG TA-SHAN
6 granted patents·80 citations·filing 1997–2010
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0195US8062536B2High density plasma chemical vapor deposition processLIU CHIH-CHIEN·Filed 2010·Granted Nov 22, 2011·20 cites·12 claims
- 0284US7271101B2High density plasma chemical vapor deposition processUNITED MICROELECTRONICS CORP·Filed 2005·Granted Sep 18, 2007·6 cites·32 claims
- 0382US6117345AHigh density plasma chemical vapor deposition processUNITED MICROELECTRONICS CORP·Filed 1997·Granted Sep 12, 2000·44 cites·21 claims
- 0463US7078346B2High density plasma chemical vapor deposition processUNITED MICROELECTRONICS CORP·Filed 2004·Granted Jul 18, 2006·5 cites·32 claims
- 0556US7718079B2High density plasma chemical vapor deposition processUNITED MICROELECTRONICS CORP·Filed 2001·Granted May 18, 2010·3 cites·26 claims
- 0650US7514014B1High density plasma chemical vapor deposition processUNITED MICROELECTRONICS CORP·Filed 2000·Granted Apr 7, 2009·2 cites·40 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →