Inventor · disambiguated record

Tatuhiro Ueki

Also filed as: UEKI TATUHIRO

0 granted patents·2 pending applications·0 citations·filing 2014–2015

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0142US2014251539A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
0229US2015323250A1Substrate processing apparatus, deposit removing method of substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →