Inventor · disambiguated record

Takuo Umeda

Also filed as: UMEDA TAKUO

0 granted patents·1 pending application·0 citations·filing 2006–2006

Technology areasG03F

Files withADVANCED MASK INSPECTION TECH1

Top patents by PatentIndex Score

1 record

0142US2007064998A1Pattern inspection apparatus, pattern inspection method, and inspection sampleADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites

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