Inventor · disambiguated record
Takuya Umise
Also filed as: UMISE TAKUYA
4 granted patents·1 pending application·3 citations·filing 2016–2022
57Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0178US10381258B2Apparatus of processing workpiece in depressurized spaceTOKYO ELECTRON LTD·Filed 2016·Granted Aug 13, 2019·3 cites·13 claims
- 0253US12261078B2Processing method and processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Mar 25, 2025·0 cites·11 claims
- 0344US2022336194A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0441US11476140B2Substrate accommodating unit and maintenance method for vacuum transfer unit in substrate transfer apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·0 cites·10 claims
- 0539US11189514B2Substrate processing apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2020·Granted Nov 30, 2021·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →