Inventor · disambiguated record
Takahiko Wakatsuki
Also filed as: WAKATSUKI TAKAHIKO
3 granted patents·2 pending applications·0 citations·filing 2007–2012
39Inventor score
Top patents by PatentIndex Score
5 records- 0146US8141567B2Apparatus and method for photoresist removal processingWAKATSUKI TAKAHIKO·Filed 2007·Granted Mar 27, 2012·0 cites·11 claims
- 0242US9330948B2Heater unit, fan filter unit, and substrate processing apparatusFURUYA MASAAKI·Filed 2012·Granted May 3, 2016·0 cites·17 claims
- 0341US2007256711A1Substrate cleaning apparatus and methodHAYASHI TOSHIHIDE·Filed 2007·Application pending·0 cites
- 0441US2007246085A1Apparatus and method for photoresist removal processingTOSHIBA KK·Filed 2007·Application pending·0 cites
- 0536US8517035B2Processing apparatus and methodWAKATSUKI TAKAHIKO·Filed 2007·Granted Aug 27, 2013·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →