Inventor · disambiguated record
Takanori Yagita
Also filed as: YAGITA TAKANORI
17 granted patents·1 pending application·71 citations·filing 2005–2024
91Inventor score
Files withSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD4SEN CORP3SEN CORP AN SHI & AXCELIS CO3SEN CORP AN SHI AND AXCELIS CO3SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD3
Top patents by PatentIndex Score
18 records- 0193US9293295B2Ion implantation apparatus, final energy filter, and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Mar 22, 2016·16 cites·23 claims
- 0287US8692216B2Ion implantation apparatus and control method thereofSEN CORP·Filed 2013·Granted Apr 8, 2014·11 cites·34 claims
- 0385US7276711B2Beam space-charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 2, 2007·11 cites·12 claims
- 0481US7755067B2Ion implantation apparatus and method of converging/shaping ion beam used thereforSEN CORP·Filed 2008·Granted Jul 13, 2010·6 cites·19 claims
- 0580US7982192B2Beam processing apparatusSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Jul 19, 2011·6 cites·14 claims
- 0680US7851772B2Ion implantation apparatus and ion implantation methodSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Dec 14, 2010·6 cites·10 claims
- 0780US7315034B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Jan 1, 2008·7 cites·18 claims
- 0877US9236222B2Ion implantation apparatus and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jan 12, 2016·2 cites·8 claims
- 0974US7423276B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Sep 9, 2008·5 cites·6 claims
- 1065US9431214B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Aug 30, 2016·1 cites·16 claims
- 1163US2025014860A1Ion implantation method and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 1258US11699569B2Ion implanter and particle detection methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2021·Granted Jul 11, 2023·0 cites·20 claims
- 1355US11017978B2Ion implanter and beam park deviceSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2019·Granted May 25, 2021·0 cites·20 claims
- 1451US9343262B2Ion implantation apparatus, beam parallelizing apparatus, and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted May 17, 2016·0 cites·14 claims
- 1546US9520265B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2014·Granted Dec 13, 2016·0 cites·15 claims
- 1644US9117627B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2014·Granted Aug 25, 2015·0 cites·13 claims
- 1739US9208991B1Ion implantation apparatusSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Dec 8, 2015·0 cites·17 claims
- 1839US7411709B2Beam processing system and beam processing methodSEN CORP AN SHI & AXCELIS CO·Filed 2007·Granted Aug 12, 2008·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →