Inventor · disambiguated record
Takuya Yara
Also filed as: YARA TAKUYA
2 granted patents·2 pending applications·195 citations·filing 1997–2007
62Inventor score
Top patents by PatentIndex Score
4 records- 0189US5968377ATreatment method in glow-discharge plasma and apparatus thereofSEKISUI CHEMICAL CO LTD·Filed 1997·Granted Oct 19, 1999·195 cites·20 claims
- 0243US2008113519A1Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrateSEKISUI CHEMICAL CO LTD·Filed 2007·Application pending·0 cites
- 0334US7507678B2Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrateSEKESUI CHEMICAL CO LTD·Filed 2005·Granted Mar 24, 2009·0 cites·12 claims
- 0427US2004050685A1Method and device for atmospheric plasma processingFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →