Inventor · disambiguated record
Tatsuya Yotsutani
Also filed as: YOTSUTANI TATSUYA
3 granted patents·1 pending application·1 citations·filing 2015–2025
48Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0174US2025327175A1Method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0259US9601326B2Method of manufacturing semiconductor device, including film having uniform thicknessHITACHI INT ELECTRIC INC·Filed 2015·Granted Mar 21, 2017·1 cites·15 claims
- 0355US12371782B2Method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Jul 29, 2025·0 cites·19 claims
- 0442US11066744B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Jul 20, 2021·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →