Inventor · disambiguated record
Terukazu Aitani
Also filed as: AITANI TERUKAZU
2 granted patents·3 pending applications·99 citations·filing 1996–2006
68Inventor score
Top patents by PatentIndex Score
5 records- 0185US5902403AMethod and apparatus for cleaning a chamberAPPLIED MATERIALS INC·Filed 1996·Granted May 11, 1999·73 cites·8 claims
- 0274US6192898B1Method and apparatus for cleaning a chamberAPPLIED MATERIALS INC·Filed 1999·Granted Feb 27, 2001·26 cites·6 claims
- 0360US2006266655A1Multiple chemistry electrochemical plating methodSUN ZHI-WEN·Filed 2006·Application pending·0 cites
- 0450US2004154926A1Multiple chemistry electrochemical plating methodFiled 2003·Application pending·0 cites
- 0536US2002042192A1Shower head, substrate treatment apparatus and substrate manufacturing methodAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →