Inventor · disambiguated record
Teruo Asakawa
Also filed as: ASAKAWA TERUO
32 granted patents·2 pending applications·3,183 citations·filing 1982–2013
98Inventor score
Top patents by PatentIndex Score
34 records- 0198US6053983AWafer for carrying semiconductor wafers and method detecting wafers on carrierTOKYO ELECTRON LTD·Filed 1998·Granted Apr 25, 2000·456 cites·15 claims
- 0298US4535278ATwo-dimensional precise positioning device for use in a semiconductor manufacturing apparatusTELMEC CO LTD·Filed 1983·Granted Aug 13, 1985·199 cites·18 claims
- 0397US6224679B1Controlling gas in a multichamber processing systemTOKYO ELECTRON LTD·Filed 1998·Granted May 1, 2001·375 cites·4 claims
- 0497US5064337AHandling apparatus for transferring carriers and a method of transferring carriersTOKYO ELECTRON LTD·Filed 1990·Granted Nov 12, 1991·485 cites·20 claims
- 0597US4525659APositioning stage having a vibration suppressorTELMEC CO LTD·Filed 1982·Granted Jun 25, 1985·102 cites·1 claims
- 0696US5934856AMulti-chamber treatment systemTOKYO ELECTRON LTD·Filed 1997·Granted Aug 10, 1999·262 cites·12 claims
- 0796US5340261ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1992·Granted Aug 23, 1994·389 cites·20 claims
- 0892US5460684AStage having electrostatic chuck and plasma processing apparatus using sameTOKYO ELECTRON LTD·Filed 1993·Granted Oct 24, 1995·208 cites·13 claims
- 0989US6285102B1Drive mechanism having a gas bearing operable under a negative pressure environmentTOKYO ELECTRON LTD·Filed 2000·Granted Sep 4, 2001·48 cites·24 claims
- 1087US4986715AStock unit for storing carriersTOKYO ELECTRON LTD·Filed 1989·Granted Jan 22, 1991·78 cites·7 claims
- 1186US6841485B1Method of manufacturing semiconductor device and manufacturing line thereofTOKYO ELECTRON LTD·Filed 2000·Granted Jan 11, 2005·28 cites·16 claims
- 1286US6802934B2Processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Oct 12, 2004·33 cites·10 claims
- 1386US4555650ATwo dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatusTELMEC CO LTD·Filed 1983·Granted Nov 26, 1985·41 cites·5 claims
- 1485US8025473B2Carrying system, substrate treating device, and carrying methodTOKYO ELECTRON LTD·Filed 2005·Granted Sep 27, 2011·10 cites·18 claims
- 1584US5374147ATransfer device for transferring a substrateTOKYO ELECTRON LTD·Filed 1992·Granted Dec 20, 1994·90 cites·10 claims
- 1680US4626749ATwo-dimensional positioning deviceTOKYO ELECTRON LTD·Filed 1984·Granted Dec 2, 1986·36 cites·12 claims
- 1777US5405230ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1992·Granted Apr 11, 1995·68 cites·23 claims
- 1868US5754780AApparatus and method for performing serial communication between master and slave devicesTOKYO ELECTRON LTD·Filed 1995·Granted May 19, 1998·48 cites·25 claims
- 1968US5435683ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1994·Granted Jul 25, 1995·38 cites·20 claims
- 2064US9268328B2Production efficiency improving apparatus, production efficiency improving method, and computer programASAKAWA TERUO·Filed 2012·Granted Feb 23, 2016·2 cites·20 claims
- 2164US5382803AIon injection deviceTOKYO ELECTRON LTD·Filed 1992·Granted Jan 17, 1995·37 cites·7 claims
- 2263US5357115AProcessing method for wafersTOKYO ELECTRON LTD·Filed 1993·Granted Oct 18, 1994·35 cites·13 claims
- 2363US5248886AProcessing systemTOKYO ELECTRON LTD·Filed 1992·Granted Sep 28, 1993·36 cites·20 claims
- 2458US7566665B2Semiconductor device manufacturing method and manufacturing line thereofTOKYO ELECTRON LTD·Filed 2004·Granted Jul 28, 2009·4 cites·4 claims
- 2554US5857827ACassette chamberTOKYO ELECTRON LTD·Filed 1997·Granted Jan 12, 1999·19 cites·19 claims
- 2653US6988867B2Transfer apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Jan 24, 2006·3 cites·5 claims
- 2753US5947677ACassette transfer mechanismTOKYO ELECTRON LTD·Filed 1997·Granted Sep 7, 1999·18 cites·10 claims
- 2852US9696711B2Processing instructing device, processing instructing method, computer program and processing deviceASAKAWA TERUO·Filed 2012·Granted Jul 4, 2017·1 cites·20 claims
- 2951US4476420ACircuit arrangement for synthesizing a sinusoidal position signal having a desired phase and high-resolution positioning system making use of the circuit arrangementTELMEC CO LTD·Filed 1982·Granted Oct 9, 1984·11 cites·13 claims
- 3050US2005260824A1Semiconductor device manufacturing method and manufacturing line thereofTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 3147US6013112ARelay apparatus for relaying object to be treatedTOKYO ELECTRON LTD·Filed 1997·Granted Jan 11, 2000·14 cites·8 claims
- 3242US6068704ATransfer arm apparatus and semiconductor processing system using the sameTOKYO ELECTRON LTD·Filed 1997·Granted May 30, 2000·9 cites·16 claims
- 3340US2002020355A1Processing apparatusFiled 2001·Application pending·0 cites
- 3436US9639686B2Operation limiting device, operation limiting method, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted May 2, 2017·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →