Inventor · disambiguated record
Teruhiko Moriya
Also filed as: MORIYA TERUHIKO
3 granted patents·2 pending applications·0 citations·filing 2017–2023
37Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0151US2025316507A1Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0246US10877376B2Light irradiating deviceTOKYO ELECTRON LTD·Filed 2019·Granted Dec 29, 2020·0 cites·10 claims
- 0346US2024369339A1Substrate thickness measuring device, substrate processing system, and substrate thickness measuring methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0436US10558125B2Exposure apparatus, exposure apparatus adjustment method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Feb 11, 2020·0 cites·20 claims
- 0535US10747121B2Optical processing apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Aug 18, 2020·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →