Inventor · disambiguated record
Tetsuya Niya
Also filed as: NIYA TETSUYA
1 granted patent·2 pending applications·10 citations·filing 2012–2017
32Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0184US8896210B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2012·Granted Nov 25, 2014·10 cites·21 claims
- 0258US2017233860A1Manufacturing method for component in plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 0353US2016076129A1Component for plasma processing apparatus, and manufacturing method thereforTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →