Inventor · disambiguated record
Tetu Ohsawa
Also filed as: OHSAWA TETU
4 granted patents·146 citations·filing 1993–1997
81Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0184US5645391ASubstrate transfer apparatus, and method of transferring substratesTOKYO ELECTRON LTD·Filed 1995·Granted Jul 8, 1997·75 cites·19 claims
- 0283USD366868SWafer boat or rackTOKYO ELECTRON LTD·Filed 1993·Granted Feb 6, 1996·28 cites·1 claims
- 0367US5813819ASubstrate transfer apparatus, and method of transferring substratesTOKYO ELECTRON LTD·Filed 1997·Granted Sep 29, 1998·32 cites·12 claims
- 0437US5296412AMethod of heat treating semiconductor wafers by varying the pressure and temperatureTOKYO ELECTRON LTD·Filed 1993·Granted Mar 22, 1994·11 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →