Inventor · disambiguated record
Tetsu Oosawa
Also filed as: OOSAWA TETSU
7 granted patents·690 citations·filing 1992–2000
90Inventor score
Top patents by PatentIndex Score
7 records- 0196US5340261ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1992·Granted Aug 23, 1994·389 cites·20 claims
- 0288US6358324B1Microwave plasma processing apparatus having a vacuum pump located under a susceptorTOKYO ELECTRON LTD·Filed 2000·Granted Mar 19, 2002·31 cites·12 claims
- 0387US5445486ASubstrate transferring apparatusTEL SAGAMI LTD·Filed 1994·Granted Aug 29, 1995·110 cites·9 claims
- 0477US5405230ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1992·Granted Apr 11, 1995·68 cites·23 claims
- 0568US5435683ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1994·Granted Jul 25, 1995·38 cites·20 claims
- 0666US6032083ASubstrate transfer apparatus and heat treatment system using the sameTOKYO ELECTRON LTD·Filed 1996·Granted Feb 29, 2000·36 cites·12 claims
- 0752US5984607ATransfer apparatus, transfer method, treatment apparatus and treatment methodTOKYO ELECTRON LTD·Filed 1996·Granted Nov 16, 1999·18 cites·22 claims
Join the waitlist — get patent alerts
Get an alert when Tetsu Oosawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →