Inventor · disambiguated record
Tetsuya Sada
Also filed as: SADA TETSUYA
11 granted patents·1 pending application·798 citations·filing 1996–2014
93Inventor score
Top patents by PatentIndex Score
12 records- 0197US6129546AHeat process apparatus and heat process methodTOKYO ELECTRON LTD·Filed 1999·Granted Oct 10, 2000·530 cites·15 claims
- 0291US6159288AMethod and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·57 cites·10 claims
- 0377US5941083ACooling device and cooling methodTOKYO ELECTRON LTD·Filed 1996·Granted Aug 24, 1999·41 cites·9 claims
- 0474US6062240ATreatment deviceTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·45 cites·29 claims
- 0571US6391110B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted May 21, 2002·15 cites·4 claims
- 0670US6565656B2Coating processing apparatusTOYKO ELECTRON LTD·Filed 2000·Granted May 20, 2003·14 cites·14 claims
- 0769US6889764B2Cooling device and cooling methodTOKYO ELECTRON LTD·Filed 2001·Granted May 10, 2005·10 cites·3 claims
- 0867US6238511B1Method and apparatus for processing substrateTOKYO ELECTRON LTD·Filed 1998·Granted May 29, 2001·34 cites·11 claims
- 0960US6216475B1Cooling device and cooling methodTOKYO ELECTRON LTD·Filed 1999·Granted Apr 17, 2001·19 cites·2 claims
- 1053US6456480B1Processing apparatus and a processing methodTOKYO ELECTRON LTD·Filed 1999·Granted Sep 24, 2002·18 cites·18 claims
- 1149US6002572AProcessing apparatus and a processing methodTOKYO ELECTRON LTD·Filed 1998·Granted Dec 14, 1999·15 cites·5 claims
- 1245US2014353505A1Defect inspecting apparatus and defect inspecting methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →