Inventor · disambiguated record
Tetsuya Sakazaki
Also filed as: SAKAZAKI TETSUYA
6 granted patents·3 pending applications·6 citations·filing 2012–2025
72Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0189US11545367B2Substrate processing apparatus, substrate processing method, and chemical liquidTOKYO ELECTRON LTD·Filed 2021·Granted Jan 3, 2023·2 cites·10 claims
- 0278US11306249B2Substrate processing method, substrate processing device and etching liquidTOKYO ELECTRON LTD·Filed 2019·Granted Apr 19, 2022·2 cites·12 claims
- 0372US12371796B2Substrate processing apparatus, substrate processing method, and chemical liquidTOKYO ELECTRON LTD·Filed 2022·Granted Jul 29, 2025·0 cites·11 claims
- 0466US9111967B2Liquid processing method, liquid processing apparatus and storage mediumSEKIGUCHI KENJI·Filed 2012·Granted Aug 18, 2015·2 cites·20 claims
- 0563US12203021B2Substrate processing device and etching liquidTOKYO ELECTRON LTD·Filed 2022·Granted Jan 21, 2025·0 cites·2 claims
- 0660US2025124621A1Display device, recording medium, and display methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0757US2025372456A1Substrate processing apparatus, calibration substrate, and calibration methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0853US11915941B2Dynamically adjusted purge timing in wet atomic layer etchingTOKYO ELECTRON LTD·Filed 2022·Granted Feb 27, 2024·0 cites·21 claims
- 0951US2022347711A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →