Inventor · disambiguated record
Tensei Sato
Also filed as: SATO TENSEI
4 granted patents·6 pending applications·5 citations·filing 2018–2024
60Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0188US11315812B2Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatusEBARA CORP·Filed 2018·Granted Apr 26, 2022·5 cites·11 claims
- 0264US12191178B2Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatusEBARA CORP·Filed 2022·Granted Jan 7, 2025·0 cites·10 claims
- 0360US2023203701A1Plating apparatus and plating methodEBARA CORP·Filed 2022·Application pending·0 cites
- 0459US2024192075A1Method of detecting leakageEBARA CORP·Filed 2023·Application pending·0 cites
- 0558US2023203702A1Plating apparatus, control method for plating apparatus and nonvolatile storage medium storing programEBARA CORP·Filed 2022·Application pending·0 cites
- 0655US2025225022A1Method for operating semiconductor manufacturing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0752US11866842B2Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatusEBARA CORP·Filed 2021·Granted Jan 9, 2024·0 cites·3 claims
- 0851US2025183100A1Method for determining health index of substrate processing apparatus and substrate processing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0946US2024145277A1Semiconductor manufacturing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 1043US11661669B2Substrate processing system, controller and method using test operation without substrateEBARA CORP·Filed 2021·Granted May 30, 2023·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →