Inventor · disambiguated record
Tersem Summan
Also filed as: SUMMAN TERSEM
4 granted patents·45 citations·filing 2008–2017
75Inventor score
Top patents by PatentIndex Score
4 records- 0196US9721784B2Ultra-conformal carbon film depositionAPPLIED MATERIALS INC·Filed 2014·Granted Aug 1, 2017·29 cites·16 claims
- 0289US10074534B2Ultra-conformal carbon film depositionAPPLIED MATERIALS INC·Filed 2017·Granted Sep 11, 2018·5 cites·9 claims
- 0381US8679987B2Deposition of an amorphous carbon layer with high film density and high etch selectivityREILLY PATRICK·Filed 2012·Granted Mar 25, 2014·7 cites·20 claims
- 0478US8097082B2Nonplanar faceplate for a plasma processing chamberZHOU JIANHUA·Filed 2008·Granted Jan 17, 2012·4 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →