Inventor · disambiguated record
Terushige Takeyama
Also filed as: TAKEYAMA TERUSHIGE
4 granted patents·2 pending applications·80 citations·filing 2001–2009
79Inventor score
Top patents by PatentIndex Score
6 records- 0180US6561343B2Magnetic carrying deviceANELVA CORP·Filed 2001·Granted May 13, 2003·25 cites·7 claims
- 0275US6660089B2Substrate support mechanism and substrate rotation deviceANELVA CORP·Filed 2001·Granted Dec 9, 2003·12 cites·8 claims
- 0372US6461484B2Sputtering deviceANELVA CORP·Filed 2001·Granted Oct 8, 2002·18 cites·27 claims
- 0467US6319373B2Substrate transfer apparatus of substrate processing systemANELVA CORP·Filed 2001·Granted Nov 20, 2001·25 cites·5 claims
- 0547US2010055348A1Deposition apparatus and deposition methodCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0636US2002144881A1Magnetic carrying deviceFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →