Inventor · disambiguated record
Tetsu Tsunamoto
Also filed as: TSUNAMOTO TETSU
4 granted patents·2 pending applications·5 citations·filing 2012–2025
63Inventor score
Top patents by PatentIndex Score
6 records- 0176US11462431B2Discharging method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 4, 2022·1 cites·12 claims
- 0276US11456199B2Measurement method and measuring jigTOKYO ELECTRON LTD·Filed 2019·Granted Sep 27, 2022·2 cites·10 claims
- 0373US10720313B2Measuring device, measurement method, and plasma processing deviceTOKYO ELECTRON LTD·Filed 2018·Granted Jul 21, 2020·2 cites·7 claims
- 0456US11658012B2Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 23, 2023·0 cites·8 claims
- 0554US2025210325A1Electrostatic chuck and method for manufacturing electrostatic chuckTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0636US2013056154A1Abnormality detecting unit and abnormality detecting methodNAKAYA MICHIKO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →