Inventor · disambiguated record
Tejas Ulavi
Also filed as: ULAVI TEJAS · ULAVI TEJAS UMESH
24 granted patents·9 pending applications·12 citations·filing 2017–2024
91Inventor score
Files withAPPLIED MATERIALS INC33
Top patents by PatentIndex Score
33 records- 0197US11430686B2Pedestal heater for spatial multi-wafer processing toolAPPLIED MATERIALS INC·Filed 2020·Granted Aug 30, 2022·5 cites·19 claims
- 0287US10600624B2System and method for substrate processing chambersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·5 cites·22 claims
- 0380US10636628B2Method for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Apr 28, 2020·2 cites·13 claims
- 0477US12442080B2Plasma showerhead assembly and method of reducing defectsAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·19 claims
- 0576US12087555B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2022·Granted Sep 10, 2024·0 cites·12 claims
- 0674US2025054804A1Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing toolAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0773US11769684B2Wafer heater with backside and integrated bevel purgeAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·0 cites·18 claims
- 0873US2022403520A1Ground path systems for providing a shorter and symmetrical ground pathAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0972US11682576B2Pedestal heater for spatial multi-wafer processing toolAPPLIED MATERIALS INC·Filed 2022·Granted Jun 20, 2023·0 cites·20 claims
- 1071US11950384B2Dynamic electrical and fluid delivery system with indexing motion for batch processing chambersAPPLIED MATERIALS INC·Filed 2023·Granted Apr 2, 2024·0 cites·19 claims
- 1171US2024304470A1Heater assembly with process gap control for batch processing chambersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1267US2025320603A1Methods for improving throughput and gapfill quality for metal depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1367US2025316455A1Plasma showerhead assemblyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1466US11532462B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Dec 20, 2022·0 cites·20 claims
- 1565US11623253B2In-situ DC plasma for cleaning pedestal heaterAPPLIED MATERIALS INC·Filed 2022·Granted Apr 11, 2023·0 cites·17 claims
- 1664US11602064B2Dynamic electrical and fluid delivery system with indexing motion for batch processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·0 cites·20 claims
- 1762US11479855B2Spatial wafer processing with improved temperature uniformityAPPLIED MATERIALS INC·Filed 2020·Granted Oct 25, 2022·0 cites·10 claims
- 1861US10787739B2Spatial wafer processing with improved temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Sep 29, 2020·0 cites·16 claims
- 1960US12020957B2Heater assembly with process gap control for batch processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Jun 25, 2024·0 cites·18 claims
- 2060US11260432B2In-situ DC plasma for cleaning pedestal heaterAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·0 cites·3 claims
- 2158US12183618B2Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing toolAPPLIED MATERIALS INC·Filed 2020·Granted Dec 31, 2024·0 cites·18 claims
- 2257US2025246447A1Choke plates for semiconductor manufacturing processing chambersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2357US2021111059A1Wafer Heater With Backside And Integrated Bevel PurgeAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2455US12018376B2Apparatus and methods for motor shaft and heater levelingAPPLIED MATERIALS INC·Filed 2020·Granted Jun 25, 2024·0 cites·9 claims
- 2554US10910243B2Thermal management systemAPPLIED MATERIALS INC·Filed 2019·Granted Feb 2, 2021·0 cites·20 claims
- 2653US11791190B2Apparatus and methods for real-time wafer chucking detectionAPPLIED MATERIALS INC·Filed 2021·Granted Oct 17, 2023·0 cites·17 claims
- 2752US11434569B2Ground path systems for providing a shorter and symmetrical ground pathAPPLIED MATERIALS INC·Filed 2019·Granted Sep 6, 2022·0 cites·20 claims
- 2850US11923233B2Dual-function wafer backside pressure control and edge purgeAPPLIED MATERIALS INC·Filed 2020·Granted Mar 5, 2024·0 cites·16 claims
- 2949US11107704B2Gas input system for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 31, 2021·0 cites·19 claims
- 3048US2021292898A1Pedestal Geometry for Fast Gas ExchangeAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3146US11049699B2Gas box for CVD chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·0 cites·16 claims
- 3242US2021159094A1Universal adjustable blocker plate for flow distribution tuningAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3340US10910238B2Heater pedestal assembly for wide range temperature controlAPPLIED MATERIALS INC·Filed 2017·Granted Feb 2, 2021·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →