Inventor · disambiguated record

Tetsu Zenko

Also filed as: ZENKO TETSU

1 granted patent·1 pending application·0 citations·filing 2005–2020

5Inventor score

Technology areasC23C H10W

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0142US2005136657A1Film-formation method for semiconductor processTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
0241US11970767B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Apr 30, 2024·0 cites·10 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →