Inventor · disambiguated record
Thai Cheng Chua
Also filed as: CHUA THAI C · CHUA THAI CHENG
61 granted patents·33 pending applications·928 citations·filing 2002–2025
99Inventor score
Top patents by PatentIndex Score
94 records- 0199US9821411B2Apparatuses, systems and methods for three-dimensional printingVELO3D INC·Filed 2015·Granted Nov 21, 2017·135 cites·30 claims
- 0299US9399256B2Apparatuses, systems and methods for three-dimensional printingVELO3D INC·Filed 2015·Granted Jul 26, 2016·168 cites·22 claims
- 0398US11404248B2Modular microwave plasma sourceAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·4 cites·7 claims
- 0498US10763150B2System for coupling a voltage to spatially segmented portions of the wafer with variable voltageAPPLIED MATERIALS INC·Filed 2017·Granted Sep 1, 2020·42 cites·20 claims
- 0598US10507549B2Apparatuses, systems and methods for three-dimensional printingVELO3D INC·Filed 2017·Granted Dec 17, 2019·13 cites·20 claims
- 0698US10510575B2Substrate support with multiple embedded electrodesAPPLIED MATERIALS INC·Filed 2017·Granted Dec 17, 2019·64 cites·17 claims
- 0797US11670489B2Modular microwave source with embedded ground surfaceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·4 cites·10 claims
- 0897US10493564B2Apparatuses, systems and methods for three-dimensional printingVELO3D INC·Filed 2016·Granted Dec 3, 2019·8 cites·28 claims
- 0996US10714372B2System for coupling a voltage to portions of a substrateAPPLIED MATERIALS INC·Filed 2017·Granted Jul 14, 2020·44 cites·20 claims
- 1095US11049694B2Modular microwave source with embedded ground surfaceAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·12 cites·20 claims
- 1195US7214628B2Plasma gate oxidation process using pulsed RF source powerAPPLIED MATERIALS INC·Filed 2005·Granted May 8, 2007·33 cites·19 claims
- 1294US8143147B1Methods and systems for forming thin filmsKRAUS PHILIP A·Filed 2011·Granted Mar 27, 2012·16 cites·20 claims
- 1394US7601648B2Method for fabricating an integrated gate dielectric layer for field effect transistorsAPPLIED MATERIALS INC·Filed 2006·Granted Oct 13, 2009·89 cites·18 claims
- 1494US7141514B2Selective plasma re-oxidation process using pulsed RF source powerAPPLIED MATERIALS INC·Filed 2005·Granted Nov 28, 2006·26 cites·18 claims
- 1593US12198966B2Substrate support with multiple embedded electrodesAPPLIED MATERIALS INC·Filed 2021·Granted Jan 14, 2025·2 cites·15 claims
- 1692US7837838B2Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Nov 23, 2010·20 cites·27 claims
- 1792US7514373B2Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energyAPPLIED MATERIALS INC·Filed 2006·Granted Apr 7, 2009·16 cites·33 claims
- 1892US7179754B2Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energyAPPLIED MATERIALS INC·Filed 2004·Granted Feb 20, 2007·51 cites·21 claims
- 1989US6660659B1Plasma method and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2002·Granted Dec 9, 2003·44 cites·20 claims
- 2088US11037764B2Modular microwave source with local Lorentz forceAPPLIED MATERIALS INC·Filed 2017·Granted Jun 15, 2021·4 cites·14 claims
- 2188US7645709B2Methods for low temperature oxidation of a semiconductor deviceAPPLIED MATERIALS INC·Filed 2007·Granted Jan 12, 2010·13 cites·15 claims
- 2288US7645710B2Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma systemAPPLIED MATERIALS INC·Filed 2007·Granted Jan 12, 2010·13 cites·19 claims
- 2388US7605008B2Plasma ignition and complete faraday shielding of capacitive coupling for an inductively-coupled plasmaAPPLIED MATERIALS INC·Filed 2007·Granted Oct 20, 2009·11 cites·10 claims
- 2487US2022297186A1Apparatuses, systems and methods for three-dimensional printingVELO3D INC·Filed 2022·Application pending·0 cites
- 2586US11081317B2Modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2018·Granted Aug 3, 2021·3 cites·19 claims
- 2685US10943768B2Modular high-frequency source with integrated gas distributionAPPLIED MATERIALS INC·Filed 2018·Granted Mar 9, 2021·3 cites·9 claims
- 2785US10937678B2Substrate support with multiple embedded electrodesAPPLIED MATERIALS INC·Filed 2019·Granted Mar 2, 2021·2 cites·17 claims
- 2885US10720311B2Phased array modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2019·Granted Jul 21, 2020·2 cites·20 claims
- 2985US8318590B2Methods and systems for forming thin filmsKRAUS PHILIP A·Filed 2012·Granted Nov 27, 2012·5 cites·16 claims
- 3085US2023040341A1Three-dimensional printingVELO3D INC·Filed 2022·Application pending·0 cites
- 3184US11114282B2Phased array modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·1 cites·20 claims
- 3284US10504699B2Phased array modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2018·Granted Dec 10, 2019·3 cites·20 claims
- 3384US8524581B2GaN epitaxy with migration enhancement and surface energy modificationKRAUS PHILIP A·Filed 2011·Granted Sep 3, 2013·7 cites·19 claims
- 3483US11393661B2Remote modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2018·Granted Jul 19, 2022·3 cites·15 claims
- 3583US10707058B2Symmetric and irregular shaped plasmas using modular microwave sourcesAPPLIED MATERIALS INC·Filed 2017·Granted Jul 7, 2020·3 cites·16 claims
- 3682US12191118B2Monolithic modular microwave source with integrated process gas distributionAPPLIED MATERIALS INC·Filed 2024·Granted Jan 7, 2025·0 cites·20 claims
- 3782US11881384B2Monolithic modular microwave source with integrated process gas distributionAPPLIED MATERIALS INC·Filed 2019·Granted Jan 23, 2024·2 cites·19 claims
- 3882US10748745B2Modular microwave plasma sourceAPPLIED MATERIALS INC·Filed 2016·Granted Aug 18, 2020·2 cites·16 claims
- 3982US7727828B2Method for fabricating a gate dielectric of a field effect transistorAPPLIED MATERIALS INC·Filed 2006·Granted Jun 1, 2010·8 cites·22 claims
- 4081US7678710B2Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma systemAPPLIED MATERIALS INC·Filed 2006·Granted Mar 16, 2010·7 cites·37 claims
- 4181US2024282554A1Modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4278US12144090B2Monolithic modular microwave source with integrated temperature controlAPPLIED MATERIALS INC·Filed 2022·Granted Nov 12, 2024·0 cites·15 claims
- 4377US8665511B2Electrochromic device with improved transparent conductor and method for forming the sameLE HIEN MINH HUU·Filed 2011·Granted Mar 4, 2014·2 cites·19 claims
- 4477US2024131789A1Three-dimensional printingVELO3D INC·Filed 2023·Application pending·0 cites
- 4576US8377803B2Methods and systems for forming thin filmsINTERMOLECULAR INC·Filed 2012·Granted Feb 19, 2013·2 cites·19 claims
- 4676US7888217B2Method for fabricating a gate dielectric of a field effect transistorAPPLIED MATERIALS INC·Filed 2005·Granted Feb 15, 2011·5 cites·36 claims
- 4776US6998153B2Suppression of NiSi2 formation in a nickel salicide process using a pre-silicide nitrogen plasmaAPPLIED MATERIALS INC·Filed 2003·Granted Feb 14, 2006·24 cites·12 claims
- 4876US2022344131A1Modular microwave plasma sourceAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4974US12002654B2Modular high-frequency sourceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 4, 2024·0 cites·15 claims
- 5074US2023026546A1Monolithic modular high-frequency plasma sourceAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
Showing the top 50 of 94 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →